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157 Nm

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf

…with gate valve
PART NUMBER Attenuator Module,
Manual
Attenuator Module,
Motorized
Attenuator Module,
for 157 nm
Wavelength (nm) 157
193
248
308
351
-
2910218
2910216
1116181
1116182
-
1116186
2910566

COHR ExciStar DS 0318 6.pdf

COHR ExciStar DS 0318 6.pdf

…IV LASER RADIATION PRODUCT
PER EN/IEC 60825-1 (2014)
MAX. AVERAGE POWER: 18 W
MAX. OUTPUT ENERGY: 25 mJ/pulse
PULSE DURATION: 3 to 15 ns
WAVELENGTH: 157 to 351 nm, 620 to 800 nm
ExciStar Datasheet
MECHANICAL SPECIFICATIONS
ExciStar Side View Rear View

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…They can produce several discrete wavelengths throughout the UV; depending on the gas
combination, emission ranges from 157 to 348 nm. The deep-UV line at 193 nm is the most widely used source for lithography processes in the semiconductor
industry. The 308-nm wavelength is used for…

compatibility matrix 02

compatibility matrix 02


ExciStar XS 200 157, 193 nm FieldMaxII-TO PM10X FieldMaxII-TOP J-25MUV-193
ExciStar XS 200 248, 351 nm FieldMaxII-TO PM10X FieldMaxII-TOP J-25MUV-248
ExciStar XS 500 157, 193, 248, 351 nm FieldMaxII-TO PM10X LabMax-TOP J-25MT-10KHZ
ExciStar S 157, 193 nm FieldMaxII-TO PM10X…

EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…high process
throughput using excimer lasers. No
other laser technology can provide
UV light at wavelengths like 308 nm,
248 nm, 193 nm or 157 nm with the kind
of output power that an excimer produces.
These characteristics are important
because in nearly every…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…a UV coating that is optimized for use at ultraviolet
wavelengths. Spectral compensation allows the sensors to be used from
157 nm to 1064 nm.
Device
Specifications
PM2X PM10X PM30X
5 mW to 30W
PowerMax-USB/RS Sensors
51 mm
(2.0 in.)
36 mm…

2009 LMCCatalog86.pdf

2009 LMCCatalog86.pdf

…PM10
Mira OPO 500 to 1600 FieldMaxII-TO PS10
Laser Wavelength (nm) Power Meter Power Sensor Energy Meter Energy Sensor
BraggStar 193, 248 FieldMaxII-TO PM10X LabMax-TOP J-25MT-10KHZ
COMPexPro F2 157 FieldMaxII-TO PM10X FieldMaxII-TOP J-25MUV-193
COMPexPro 193 FieldMaxII-TO…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…with gate valve
PART NUMBER Attenuator Module,
Manual
Attenuator Module,
Motorized
Attenuator Module,
for 157 nm
Wavelength (nm) 157
193
248
308
351
-
2910218
2910216
1116181
1116182
-
1116186
2910566

COHR ExciStar DS 1018 7.pdf

COHR ExciStar DS 1018 7.pdf

…IV LASER RADIATION PRODUCT
PER EN/IEC 60825-1 (2014)
MAX. AVERAGE POWER: 18 W
MAX. OUTPUT ENERGY: 25 mJ/pulse
PULSE DURATION: 3 to 15 ns
WAVELENGTH: 157 to 351 nm, 620 to 800 nm
ExciStar Datasheet
MECHANICAL SPECIFICATIONS
ExciStar Side View Rear View

COHR ExciStar DS 0120 1.pdf

COHR ExciStar DS 0120 1.pdf

…IV LASER RADIATION PRODUCT
PER EN/IEC 60825-1 (2014)
MAX. AVERAGE POWER: 18 W
MAX. OUTPUT ENERGY: 25 mJ/pulse
PULSE DURATION: 3 to 15 ns
WAVELENGTH: 157 to 351 nm, 620 to 800 nm
ExciStar Datasheet
MECHANICAL SPECIFICATIONS
ExciStar Side View Rear View