1 - 10 of 451 Search Results for 193
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1.
LPXpro® Series
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LPXpro® Series Medium-Power Excimer Laser Series Medium-Power F (193, 248, 351 nm), XeCl (308 nm) or F2 (157, 193 nm) multi-purpose excimer laser providing a broad range of UV power. Measurement tools for this laser: FieldMax-TOP PM150X (P/N 1098455) LPXpro is a family of RoHS compliant excimer lasers ...
Related Searches: 308 nm | pld | lpxpro | 193 nm
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3.
VarioLas_1000_DS
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... Representative. Printed in the U.S.A. MC-003-08-0M1107 Copyright ©2007 Coherent, Inc. Laser Source Coherent Excimer Laser COMPex 100 Wavelength (nm) 193, 248, 308 or 351 Size of Homogeneous Mask Field (mm) 14x 14 Inhomogeneity of Mask Illumination <±2.5%, 2 s Mask Holder For mask size 4 in. x 4 in ...
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4.
Phase_Shift_Mask_Measurements_with_Excimer_Lasers205
(PAGE 3 OF 3)
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... phase shifting configurations. The reproducibility of the diffractive shearing interference microscope was found to be l/650 RMS, or 0.3 nm at l = 193 nm (see Fig. 3). The interferometer was extremely stable and easy to use. The phase step introduced by binary phase shift structures can be extracted ...
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5.
Sensors - EnergyMax Laser Energy
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... High Repetition Rate: for up to 10 kHz operation YAG/Harmonics and IR: specifically for Nd:YAG, Ruby and Holmium lasers Excimer Laser: intended for 193 nm and 248 nm excimer lasers EnergyMax sensors are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters. (Note ...
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6.
SemiManufMagRev2
(PAGE 1 OF 5)
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... based on the 248 nm excimer laser has become mainstream and will probably take the industry through to the 90 nm technology node. Furthermore, 193 nm excimer laser-based lithography is the most likely successor technology, and will almost certainly be used through the 65 nm node and possibly even to ...
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7.
pdf_127
(PAGE 11 OF 12)
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11 Laser Ablation ICP Mass Spectrometry for Solid Sampling Using a 193 nm ArF Excimer Ablation System Peter Oesterlin, Manager Projects and Quality MicroLas Lasersystem GmbH, Goettingen, Germany Elemental analysis is most conveniently achieved by mass spectrometry. Mass spectrometry has the potential ...
Related Searches: homogenizer
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8.
GeoLasPro_DSrev.A_1
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GeoLasPro 193 nm Solid Sampling System for LA-ICP-MS Features · Superior sample observation · Real petrographic microscope · Excellent day-to-day performance · Sturdy design · Purgable beam path · Motorized high-resolution x-y-z-stage · Dual-axis homogenizer · Widest range of energy densities · CE ...
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9.
Excimer_Product_Guide_2008
(PAGE 40 OF 48)
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... x 180 mm base profile Vacuum-Tight Optical Module Aluminum module with observation window. Integrated 5-axes-adjustable optics mount for 157 nm and 193 nm applications with 3 (x, y, phi) of the axes adjustable from outside the module. Integrated adjustment tool.With flanges for tube connections, purge ...
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10.
Sensors - EnergyMax Laser Energy
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... High Repetition Rate: for up to 10 kHz operation YAG/Harmonics and IR: specifically for Nd:YAG, Ruby and Holmium lasers Excimer Laser: intended for 193 nm and 248 nm excimer lasers EnergyMax sensors are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters. (Note ...
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