1 - 10 of 384 Search Results for 193 nm
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1.
Indigo_DUV
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Solid-State, Single Frequency, 193 nm Laser Coherent Solid-State Ti:Sapphire FEATURES · All solid-state design · Narrow linewidth · Long coherence length · Precision wavelength control · TEM00 beam profile · Stable (<3% RMS) at deep UV wavelengths KEY APPLICATIONS · 193 nm metrology · Spectrometer ...
Related Searches: 193 nm laser | deep uv | indigo
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2.
Excimer_ProductGuide2009_7
(PAGE 11 OF 52)
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... 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.) ExciStar XS Excimer Lasers 11 ExcimerLasers Specifications (continued) Wavelength (nm) 157 193 248 351 Part No. EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz, without energy monitor) -w/o emon -w/o emon -w/o emon ...
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3.
COMPexPro® Series
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... ; Marking ... For detailed specifications, see part number. Name Description Unstable Resonator Optics 100 (193 nm) For COMPexPro 50 & 100 series Unstable Resonator Optics 100 (248 nm) For COMPexPro 50 & 100 series Unstable Resonator Optics 100 (308 nm ...
Related Searches: compexpro 50 | compex 205 | compexpro 110 | compex 201
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4.
LPXpro® Series
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LPXpro® Series Medium-Power Excimer Laser Series Medium-Power F (193, 248, 351 nm), XeCl (308 nm) or F2 (157, 193 nm) multi-purpose excimer laser providing a broad range of UV power. Measurement tools for this laser: FieldMax-TOP PM150X (P/N 1098455) LPXpro is a family of RoHS compliant excimer lasers ...
Related Searches: unstable resonator | lpxpro | pld
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5.
Phase_Shift_Mask_Measurements_with_Excimer_Lasers205
(PAGE 2 OF 3)
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... measurement accuracy, especially if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order ...
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7.
50390-251_2
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... years to come. In particular, the excimer laser's ability to deliver high pulse energies and high average powers at multiple UV wavelengths (157, 193, 248, 308, and 351 nm)--plus its inherent homogenous flat-top beam profile--make it a natural for a broad range of industrial applications, particularly ...
Related Searches: tft | ito | mopa
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8.
GlobalSemiArt2Rev2
(PAGE 2 OF 2)
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... laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency ...
Related Searches: 355 nm | 532 nm
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9.
ExcimerProductGuide2009_7
(PAGE 11 OF 52)
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... 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.) ExciStar XS Excimer Lasers 11 ExcimerLasers Specifications (continued) Wavelength (nm) 157 193 248 351 Part No. EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz, without energy monitor) -w/o emon -w/o emon -w/o emon ...
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