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1.  LPXPro® Series ... (F2) (400V) Click for details LPFPro 220 (F2) (208V) Click for details LPFPro 220 (F2) (400V) Click for details LPXPro 210(ArF) (208V) Wavelength 193 nm LPXPro 210(ArF) (400V) Wavelength 193 nm LPXPro 210(KrF) (208V) Wavelength 248 nm LPXPro 210(KrF) (400V) Wavelength 248 nm LPXPro 210(XeCl) (208V) ... Related Searches: lpf 200 | vacuum pump | lpf 220

2.    Excimer_Product_Guide_2008 Best match in this PDF  |  All matches in this PDF ... 30 UV Optical Systems and Components 32 Laser Measurement and Control Accessories 42 Contents www.Coherent.com · tech.sales@coherent.com Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz) ExciStar XS1 157 1 200/500 193 5 200/500 248 8 200/500 351 4 200/500 Xantos XS1 157 1 500 193 5 500 248 ... Related Searches: spherical lens | vacuum pump | novatube | 315

3.    Indigo_DUV Best match in this PDF  |  All matches in this PDF Solid-State, Single Frequency, 193 nm Laser Coherent Solid-State Ti:Sapphire FEATURES · All solid-state design · Narrow linewidth · Long coherence length · Precision wavelength control · TEM00 beam profile · Stable (<3% RMS) at deep UV wavelengths KEY APPLICATIONS · 193 nm metrology · Spectrometer ... Related Searches: 193 nm laser | chiller | duv laser

4.  COMPexPro® Series ... such medical uses. ... For detailed specifications, see part number. Name Description COMPexPro F2(F2) Wavelength 157nm COMPexPro 50(ArF) Wavelength 193 nm COMPexPro 50(KrF) Wavelength 248 nm COMPexPro 102(ArF) Wavelength 193 nm COMPexPro 102(KrF) Wavelength 248 nm COMPexPro 102(XeCl) Wavelength 308 ... Related Searches: compexpro | compex | compex 205 | j45lp-muv

5.    GlobalSemiArt2Rev2  (PAGE 2 OF 2) ... laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency ...

6.    ExcimerProductGuide2008  (PAGE 11 OF 48) ... 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.) ExciStar XS Excimer Lasers 11 ExcimerLasers Specifications (continued) Wavelength (nm) 157 193 248 351 Part No. EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz, without energy monitor) -w/o emon -w/o emon -w/o emon ...

7.    Excimer_Product_Guide_2008  (PAGE 11 OF 48) ... 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.) ExciStar XS Excimer Lasers 11 ExcimerLasers Specifications (continued) Wavelength (nm) 157 193 248 351 Part No. EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz, without energy monitor) -w/o emon -w/o emon -w/o emon ... Related Searches: excistar 200

8.    GlobalSemiArt2Rev2 Best match in this PDF  |  All matches in this PDF ... laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency ... Related Searches: 355 nm | laser direct imaging | 488 nm

9.    SemiManufMagRev2  (PAGE 2 OF 5) ... O L O G Y M A R C H 2 0 0 5 s e m i m f g . c o m TA B L E 1 Lasers in the ITRS 1st Year of Production Technology Node Application 2004 2007 2010 90 nm 65 nm 45 nm Lithography Excimer at 248 nm Excimer at 193 nm Excimer at 193 nm Excimer at 193 nm EUV 13.4 nm Photomask Writing Excimer at 248 nm Excimer ... Related Searches: 532 nm

10.    SemiManufMagRev2 Best match in this PDF  |  All matches in this PDF ... . LITHOGRAPHY A tremendous amount has been written about the possible future path of lithography. What's clear is that lithography based on the 248 nm excimer laser has become mainstream and will probably take the industry through to the 90 nm technology node. Furthermore, 193 nm excimer laser-based ... Related Searches: acousto-optic modulator | single frequency laser | laser projector | laser television

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Search Suggestions: novatube | 193 nm laser | vacuum pump | lpf 200 | spherical lens | 315 | pm1kx | ldp | lsx 315c | lpf 220

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