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ExcimerProductGuide2011

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…nm) Max. Energy (mJ) Max. Repetition Rate (Hz) ExciStar XS1 157 1 200/500 193 5 200/500 248 8 200/500 351 4 200/500 Xantos XS1 157 1 500 193 5 500 248 8 500 351 4 500 BraggStar Industrial Series1 193 7 1000 248 11 1000 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193…
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2. 2009 LMCCatalog	Best match in this PDF \| All matches in this PDF
…500 µJ to 1J J-50MUV-193 w/o Diffuser 125 µJ to 250 mJ J-50MUV-193 w/Diffuser 125 µJ to 250 mJ J-25MUV-248 125 µJ to 250 mJ J-25MUV-193 50 µJ to 100 mJ EnergyMax Energy Range Capabilities Wide Dynamic Range for All EnergyMax Sensor Categories Heat Sink Model Wavelength4 (nm) None Small Medium Large… Related Searches: verdi-v5 \| lm-45 htd \| lm2-ir \| lm-10 htd

3. EnergyMaxGuide revA 10 FINAL	Best match in this PDF \| All matches in this PDF
…calibration wavelength) (nm) All Multipurpose Sensors (MaxBlack Coating) ±2 1064 All High Repetition Rate Sensors (Diffuse Metallic Coating) ±3 1064 J-50MB-YAG ±2 1064 J-50MB-IR ±3 1064, 2940 J-25MB-IR ±4 1064 J-25MUV-193 ±3 193 J-25MUV-248 ±3 248 J-50MUV-193 ±4 193 J-50MUV-248 ±4 248 J-10SI… Related Searches: j 50 \| j-50mb \| j-10si \| energy max

EnergyMaxSensors UserManual RevAB

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…-linearity). Description 15 MaxUV EnergyMax Sensors These sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers operating at 248 nm, and feature high accuracy and large active areas (up to 50 mm). The EnergyMax series utilizes a unique coating--called MaxUV--that…
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pdf 127

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…GeoLas system from MicroLas transforms the excimer beam into a high-fluence, homogeneous flat-top profile for uniform and precise laser ablation. The 193 nm wavelength improves ablation characteristics, resulting in decreased fractionization and superior depth profiling. see article on page 9 The Laser…
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SemiManufMagRev2

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…248 nm excimer laser has become mainstream and will probably take the industry through to the 90 nm technology node. Furthermore, 193 nm excimer laser-based lithography is the most likely successor technology, and will almost certainly be used through the 65 nm node and possibly even to 32 nm technology…
Related Searches: indigo | sapphire scribing | argon ion laser | spatial light modulator

EnergyMaxGuide FINAL

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…other than the Wavelength Model calibration wavelength) (nm) All Multipurpose Sensors (MaxBlack Coating) ±2 1064 All High Repetition Rate Sensors (Diffuse Metallic Coating) ±3 1064 J-50MB-YAG ±2 1064 J-50MB-IR ±3 1064, 2940 J-25MUV-193 ±3 193 J-50MUV-248 w/Diffuser ±4 248 J-10SI-HE ±5 532 Wavelength…
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8. Coherent Inc. Xantos XS laser at 157, 193, 248 and 351 nm.
…and solid-state switching * Energy monitor and electromechanical shutter always included * Repetition rates up to 500 Hz * Available for 157, 193, 248 and 351 nm * Air cooling, single phase * Use of premix laser gas * RoHS compliant * Products * More Information * Literature * Drawings * Specifications… Related Searches: 248nm laser \| 351nm uv laser \| xantos \| 248

9. EnergyMax-USB-RS UserManual 1186243RevAA	Best match in this PDF \| All matches in this PDF
…1191430 1191440 - Description 9 MaxUV EnergyMax Sensors These sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers operating at 248 nm, and feature high accuracy and large active areas (up to 50 mm). The EnergyMax series utilizes a unique coating--called MaxUV--that… Related Searches: lab max \| 1064 532 \| error codes \| pyroelectric

10. GlobalSemiArt2Rev2	Best match in this PDF \| All matches in this PDF
…Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency doubled ion: 257 nm Excimer: 193 nm Frequency doubled ion: 257 nm Excimer: 193 nm Frequency mixed ion: 198 nm Photomask Inspection… Related Searches: 355 nm \| 266 nm

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