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193 Nm Solid State

ExciStar

ExciStar

…Product Close PRICE HERE Ultra-Compact, Lightweight, Highly Reliable UV Light Source Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W) ExciStar 200 193 200 5 1 ExciStar 500 500 2.5 ExciStar 1000 1000 5 ExciStar 200 248 200 10 2 ExciStar 500 500 5 ExciStar…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

ExciStar XS 200/500 Ultra-Compact, Lightweight, Highly Reliable UV Light Source Features · Extremely compact size · Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and…

IndyStar

IndyStar

…billion pulses at ultra-short 193 nm and 248 nm wavelengths. The IndyStar series is engineered to meet the highest demands in every aspect of an industrial laser. Contact Us About This Product Close PRICE HERE Fast Pulse, High Precision Processing Model Name Wavelength (nm) Max. Pulse Frequency (Hz)…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order of 1% must be accurately…

Excimer laser technology trends

Excimer laser technology trends

…markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the following sections, the technical aspects of excimer lasers relevant for PLD and resulting output energy characteristics are discussed…

Microelectronics

Microelectronics

…laser-lift-off (LLO) processing with 193 nm and 248 nm excimer lasers enable vertical LED structures with increased light extraction efficiency. Laser-based sapphire scribing, as well as wafer or substrate dicing with diode-pumped solid-state lasers at 266 nm and 355 nm or picosecond lasers, further…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

USP Lasers Semiconductor Packaging Whitepaper.pdf

USP Lasers Semiconductor Packaging Whitepaper.pdf

…and USP lasers with the requisite output power for these singulation applications. The 40W Coherent AVIA NX is a nanosecond pulsewidth, UV solid- state laser that is already widely employed for semiconductor package cutting. Coherent also offers higher power AVIA NX lasers than this (up to 50W),…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

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