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193 nm laser

Excimer Laser EnergyMax Sensors

Excimer Laser EnergyMax Sensors

…with bend and strain relief protects against rough handling Coherent Excimer Laser EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. Excimer Laser EnergyMax Series sensors feature high accuracy and large active area (up to 50…

Laser Focus World - February 2016

Laser Focus World - February 2016

…tool integrates a Coherent ExciStar XS excimer laser operating at 193 nm, beam-conditioning optics, up to 16 Ibsen Photonics phase masks (uniform or FIGURE 2. The NORIA automated FBG writing tool (a) writes FBGs into an optical fiber using an excimer laser and one of a number of wheel-mounted phase…

UV Processing Solutions

UV Processing Solutions

…services are available for a wide variety of material processing using 351 nm, 308 nm, 248 nm, 193 nm, and 157 nm wavelengths. Coherent’s optical systems, modules, and components are manufactured for use with excimer lasers with easy integration into new and existing micromachining workstations and…

UV Optical Components

UV Optical Components

…Module for 157 nm (Part No.) 157 Not Available Not Available 1111338 193 2910218 1116186 Not Available 248 2910216 2910566 Not Available 308 1116181 1116184 Not Available 351 116182 2910568 Not Available Homogenizers - Superior Optics and Coatings Because excimer lasers produce high-energy…

Excimer laser technology trends

Excimer laser technology trends

…ultraviolet (UV) laser technology. Today, excimer lasers have become indispensable photonic production tools in various high-tech growth markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the…

Excimer laser technology trends

Excimer laser technology trends

…ultraviolet (UV) laser technology. Today, excimer lasers have become indispensable photonic production tools in various high-tech growth markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the…

Laser activated vapour phase processes.qxd

Laser activated vapour phase processes.qxd

…Excimer Laser (wavelength 193 nm) with an ultra high vacuum process chamber with a multi gas inlet equipped for the use with up to four process gases. In principle there are two possibilities to guide the laser beam with respect to the wafer surface: normal or parallel. Guiding the laser beam normal…

Laser activated vapour phase processes.qxd

Laser activated vapour phase processes.qxd

…1c Fig. 1: Dopand diffusion from a 10 nm thick highly boron doped layer (1a) during an 800 °C temperature step (1b) and a 700 °C temperature step (1c). Excimer Laser Why Excimer Laser? · Short Wavelength necessary for molecule dissociation · Wavelength of 193 nm suitable for a wide range of process…

Laser Focus World - November 2017

Laser Focus World - November 2017

…sources (again, because of diffraction)--specifically, excimer lasers. Both 248 and 193 nm lasers are used for photolithography. In particular, 193 nm excimer lasers enable circuit pattern features down to 10 nm, which is far below the diffraction limit. Achieving this necessitated…

Laser Focus World - February 2016

Laser Focus World - February 2016

…tool integrates a Coherent ExciStar XS excimer laser operating at 193 nm, beam-conditioning optics, up to 16 Ibsen Photonics phase masks (uniform or FIGURE 2. The NORIA automated FBG writing tool (a) writes FBGs into an optical fiber using an excimer laser and one of a number of wheel-mounted phase…

Laser Focus World - November 2017

Laser Focus World - November 2017

…single excimer laser application in terms of unit volume. What started with crude experiments on pig eyes has now evolved to more than 10,000 high-precision, compact, tabletop lasers deployed worldwide at eye clinics and LASIK centers. In the LASIK procedure, excimer laser pulses at 193 nm are used…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…many materials. Excimers represent another important pulsed laser technology. They can produce several discrete wavelengths throughout the UV; depending on the gas combination, emission ranges from 157 to 348 nm. The deep-UV line at 193 nm is the most widely used source for lithography processes in…

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