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193 nm laser

ExciStar

ExciStar

(nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W) ExciStar 200 193 200 5 1 ExciStar 500 500 2.5 ExciStar 1000 1000 5 ExciStar 200 248 200 10 2 ExciStar 500 500 5 ExciStar 1000 1000 10 Datasheet ExciStar Applications Application Process Material Diamond and Eye Glass Marking Laser

Laser activated vapour phase processes.qxd

Laser activated vapour phase processes.qxd

…1c Fig. 1: Dopand diffusion from a 10 nm thick highly boron doped layer (1a) during an 800 °C temperature step (1b) and a 700 °C temperature step (1c). Excimer Laser Why Excimer Laser? · Short Wavelength necessary for molecule dissociation · Wavelength of 193 nm suitable for a wide range of process…

Laser Focus World - November 2017

Laser Focus World - November 2017

…sources (again, because of diffraction)--specifically, excimer lasers. Both 248 and 193 nm lasers are used for photolithography. In particular, 193 nm excimer lasers enable circuit pattern features down to 10 nm, which is far below the diffraction limit. Achieving this necessitated…

Laser Focus World - February 2016

Laser Focus World - February 2016

…tool integrates a Coherent ExciStar XS excimer laser operating at 193 nm, beam-conditioning optics, up to 16 Ibsen Photonics phase masks (uniform or FIGURE 2. The NORIA automated FBG writing tool (a) writes FBGs into an optical fiber using an excimer laser and one of a number of wheel-mounted phase…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…many materials. Excimers represent another important pulsed laser technology. They can produce several discrete wavelengths throughout the UV; depending on the gas combination, emission ranges from 157 to 348 nm. The deep-UV line at 193 nm is the most widely used source for lithography processes in…

USP Lasers Semiconductor Packaging Whitepaper.pdf

USP Lasers Semiconductor Packaging Whitepaper.pdf

…sheets scribed with a nanosecond and USP laser (in the UV). The nanosecond laser processed at 66 mm/sec, while the USP laser cut at 193 mm/sec. The nanosecond laser produced a substantial HAZ - seen as a darkening in this image - while the USP laser produced none, and also delivered a substantially…

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

(nm) 248 248 193 193 248 193 Calibration Uncertainty (%)(k=2) ±3 Energy Linearity (%) ±3 Cable Length (m)2 2.5 Cable Type J DB-25 Part Number 1146243 1110572
*
* 1146237 1110575 1110745 1110741 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

(nm) 248 248 193 193 248 193 Calibration Uncertainty (%)(k=2) ±3 Energy Linearity (%) ±3 Cable Length (m)2 2.5 Cable Type J DB-25 Part Number 1146243 1110572
*
* 1146237 1110575 1110745 1110741 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

(nm) 248 248 193 193 248 193 Calibration Uncertainty (%)(k=2) ±3 Energy Linearity (%) ±3 Cable Length (m)2 2.5 Cable Type J DB-25 Part Number 1146243 1110572
*
* 1146237 1110575 1110745 1110741 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

…Wavelength (nm) 248 193 Calibration Uncertainty (%)(k=2) ±3 Energy Linearity (%) ±3 Cable Length (m) 3 Cable Type USB Part Number USB 1191449 1191448 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248…

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

…Wavelength (nm) 248 193 Calibration Uncertainty (%)(k=2) ±3 Energy Linearity (%) ±3 Cable Length (m) 3 Cable Type USB Part Number USB 1191449 1191448 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248…

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…performance behavior of the excimer laser have to be ensured. The results shown are based on diverse 193 nm excimer laser tube improvements aiming at optimizing the gas flow dynamics. This has led to extending the operational life of such compact 193 nm excimer laser tubes for the first time over…

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