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193 nm laser

Excimer laser technology trends

Excimer laser technology trends

…ultraviolet (UV) laser technology. Today, excimer lasers have become indispensable photonic production tools in various high-tech growth markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the…

Laser Focus World - November 2017

Laser Focus World - November 2017

…single excimer laser application in terms of unit volume. What started with crude experiments on pig eyes has now evolved to more than 10,000 high-precision, compact, tabletop lasers deployed worldwide at eye clinics and LASIK centers. In the LASIK procedure, excimer laser pulses at 193 nm are used…

Excimer laser technology trends

Excimer laser technology trends

…ultraviolet (UV) laser technology. Today, excimer lasers have become indispensable photonic production tools in various high-tech growth markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the…

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

Laser-Measurement-and-Control-Catalog FORMFIRST.pdf

…Accuracy EnergyMax - Laser Energy Sensors 22 + 22 4 + 4 32 + 52 9 + 25 Measurement Accuracy = where U =`Percent Calibration Uncertainty'and W =`Wavelength Accuracy' Example 1 J-10SI-HE used at 355 nm U = 3% W = 5% Measurement Accuracy = = = 5.8% Example 2 J-10MB-LE used at 532 nm U = 2% W = 2%…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…many materials. Excimers represent another important pulsed laser technology. They can produce several discrete wavelengths throughout the UV; depending on the gas combination, emission ranges from 157 to 348 nm. The deep-UV line at 193 nm is the most widely used source for lithography processes in…

VarioLas 1000 DS

VarioLas 1000 DS

…System Specifications Ablation in ITO at 248 nm VarioLasTM Family UV Material Processing Systems Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent's scientific and industrial lasers are certified to comply with the Federal…

Book.book

Book.book

Description 15 MaxUV EnergyMax Sensors These sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers operating at 248 nm, and feature high accuracy and large active areas (up to 50 mm). The EnergyMax series utilizes a unique coating--called MaxUV--that delivers…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…Wavelength (nm) 248 193 193 Calibration Uncertainty (%)(k=2) ±3 Energy Linearity (%) ±3 Cable Length (m) 3 Cable Type USB Part Number USB 1191449 1289935 1191448 Device Specifications MaxUV-coated EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers

Laser activated vapour phase processes.qxd

Laser activated vapour phase processes.qxd

…Excimer Laser (wavelength 193 nm) with an ultra high vacuum process chamber with a multi gas inlet equipped for the use with up to four process gases. In principle there are two possibilities to guide the laser beam with respect to the wafer surface: normal or parallel. Guiding the laser beam normal…

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…performance behavior of the excimer laser have to be ensured. The results shown are based on diverse 193 nm excimer laser tube improvements aiming at optimizing the gas flow dynamics. This has led to extending the operational life of such compact 193 nm excimer laser tubes for the first time over…

Excimer laser technology trends

Excimer laser technology trends

…ultraviolet (UV) laser technology. Today, excimer lasers have become indispensable photonic production tools in various high-tech growth markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the…

Laser Focus World - February 2016

Laser Focus World - February 2016

…tool integrates a Coherent ExciStar XS excimer laser operating at 193 nm, beam-conditioning optics, up to 16 Ibsen Photonics phase masks (uniform or FIGURE 2. The NORIA automated FBG writing tool (a) writes FBGs into an optical fiber using an excimer laser and one of a number of wheel-mounted phase…

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