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13 - 24 of 44 Products for '193 nm solid state' Page 2 of 4 |

193 nm solid state

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…homogeneity as solely provided by a seamless corona type preionization. 2.2 Solid state pulsed circuit To provide the high pump energy densities in a short time interval as required for population inversion, 193 nm excimer lasers are discharge pumped using a high-voltage capacitor circuit (pulser)…

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…homogeneity as solely provided by a seamless corona type preionization. 2.2 Solid state pulsed circuit To provide the high pump energy densities in a short time interval as required for population inversion, 193 nm excimer lasers are discharge pumped using a high-voltage capacitor circuit (pulser)…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

ExciStar XS 200/500 Ultra-Compact, Lightweight, Highly Reliable UV Light Source Features · Extremely compact size · Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

ExciStar XS 200/500 Ultra-Compact, Lightweight, Highly Reliable UV Light Source Features · Extremely compact size · Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order of 1% must be accurately…

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