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193 nm solid state

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…homogeneity as solely provided by a seamless corona type preionization. 2.2 Solid state pulsed circuit To provide the high pump energy densities in a short time interval as required for population inversion, 193 nm excimer lasers are discharge pumped using a high-voltage capacitor circuit (pulser)…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

ExciStar XS 200/500 Ultra-Compact, Lightweight, Highly Reliable UV Light Source Features · Extremely compact size · Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

ExciStar XS 200/500 Ultra-Compact, Lightweight, Highly Reliable UV Light Source Features · Extremely compact size · Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order of 1% must be accurately…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order of 1% must be accurately…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order of 1% must be accurately…

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