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193 nm solid state

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…if short wavelengths are to be used. For instance a phase shift between the interfering waves resulting from a 1 nm feature leads to a change in intensity of only 1.65% at 193 nm. In order to map features with sub-nanometer dimensions, changes in intensity on the order of 1% must be accurately…

Excimer laser technology trends

Excimer laser technology trends

…markets as diverse as medical [3], microelectronics [4], flat panel display [5] and automotive industries [6] mainly at the wavelengths 193, 248 and 308 nm. In the following sections, the technical aspects of excimer lasers relevant for PLD and resulting output energy characteristics are discussed…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Design · Flexible integration · Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation…

USP Lasers Semiconductor Packaging Whitepaper.pdf

USP Lasers Semiconductor Packaging Whitepaper.pdf

…and USP lasers with the requisite output power for these singulation applications. The 40W Coherent AVIA NX is a nanosecond pulsewidth, UV solid- state laser that is already widely employed for semiconductor package cutting. Coherent also offers higher power AVIA NX lasers than this (up to 50W),…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

ExciStar XS 200/500 Ultra-Compact, Lightweight, Highly Reliable UV Light Source Features · Extremely compact size · Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 15 IndyStar Excimer Lasers Parameter ArF ArF KrF KrF Wavelength(nm) 193 193 248 248 Max.RepetitionRate(Hz) 1000 2000 1000 2000 StabilizedPulseEnergy(mJ) 8 4 12 6 StabilizedPulsePower(W) 8 8 12 12 EnergyStability(sigma,%) <2 <2…

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…homogeneity as solely provided by a seamless corona type preionization. 2.2 Solid state pulsed circuit To provide the high pump energy densities in a short time interval as required for population inversion, 193 nm excimer lasers are discharge pumped using a high-voltage capacitor circuit (pulser)…

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