---

1.    ExcimerProductGuide2008  (PAGE 11 OF 48) ... 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.) ExciStar XS Excimer Lasers 11 ExcimerLasers Specifications (continued) Wavelength (nm) 157 193 248 351 Part No. EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz, without energy monitor) -w/o emon -w/o emon -w/o emon ...

2.    Excimer_Product_Guide_2008  (PAGE 11 OF 48) ... 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.) ExciStar XS Excimer Lasers 11 ExcimerLasers Specifications (continued) Wavelength (nm) 157 193 248 351 Part No. EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz, without energy monitor) -w/o emon -w/o emon -w/o emon ... Related Searches: excistar 200

3.    GlobalSemiArt2Rev2  (PAGE 2 OF 2) ... laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency ... Related Searches: 266 nm

4.    Excimer_Product_Guide_2008 Best match in this PDF  |  All matches in this PDF ... 30 UV Optical Systems and Components 32 Laser Measurement and Control Accessories 42 Contents www.Coherent.com · tech.sales@coherent.com Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz) ExciStar XS1 157 1 200/500 193 5 200/500 248 8 200/500 351 4 200/500 Xantos XS1 157 1 500 193 5 500 248 ... Related Searches: kr | spherical lens | excimer laser annealing | halogen filter

5.    ExcimerProductGuide2008 Best match in this PDF  |  All matches in this PDF ... 30 UV Optical Systems and Components 32 Laser Measurement and Control Accessories 42 Contents www.Coherent.com · tech.sales@coherent.com Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz) ExciStar XS1 157 1 200/500 193 5 200/500 248 8 200/500 351 4 200/500 Xantos XS1 157 1 500 193 5 500 248 ... Related Searches: maxblack | excimer laser annealing | 157 | 193 nm

6.    SemiManufMagRev2 Best match in this PDF  |  All matches in this PDF ... . LITHOGRAPHY A tremendous amount has been written about the possible future path of lithography. What's clear is that lithography based on the 248 nm excimer laser has become mainstream and will probably take the industry through to the 90 nm technology node. Furthermore, 193 nm excimer laser-based ... Related Searches: 266nm cw laser | mopa | acousto-optic modulator | single frequency laser

7.    SemiManufMagRev2  (PAGE 2 OF 5) ... O L O G Y M A R C H 2 0 0 5 s e m i m f g . c o m TA B L E 1 Lasers in the ITRS 1st Year of Production Technology Node Application 2004 2007 2010 90 nm 65 nm 45 nm Lithography Excimer at 248 nm Excimer at 193 nm Excimer at 193 nm Excimer at 193 nm EUV 13.4 nm Photomask Writing Excimer at 248 nm Excimer ...

8.    GlobalSemiArt2Rev2 Best match in this PDF  |  All matches in this PDF ... laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency ... Related Searches: laser direct imaging | argon ion | 488 nm

9.  COMPexPro® Series ... medical uses. ... For detailed specifications, see part number. Name Description COMPexPro F2(F2) Wavelength 157nm COMPexPro 50(ArF) Wavelength 193 nm COMPexPro 50(KrF) Wavelength 248 nm COMPexPro 102(ArF) Wavelength 193 nm COMPexPro 102(KrF) Wavelength 248 nm COMPexPro 102(XeCl) Wavelength 308 nm COMPexPro ... Related Searches: compex 102 | compexpro | compex 110 | compex 205

10.  Extreme-UV Beam Intensity Profilers ... & Performance Lasers and Laser-based Systems Laser Measurement and Control Precision Optics Related Accessories UV operation from 10-355 nm UV operation from 10-355 nm UV operation from 10-355 nm UV operation from 10-355 nm Choice of 12 mm diameter or 30 x 40 mm apertures Operation with BeamView ... Related Searches: 355 nm cw | beam profiler | uv | ccd camera

---

Search Suggestions: compex 205 | compex 102 | compex 201 | ccd camera | c-mount | beam profiler | lpxpro | 193 nm | arf | lpxpro 240

Page 1 2 3 4 5 6 7 8 9 10 11>> of 28 | Next

Site Search by

Coherent Contact Information