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248 Nm 30 W

COMPex excimer laser

COMPex excimer laser

…Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W) COMPex 50 193 50 100 4 COMPex 102 20 240 4.8 COMPex 110 100 240 12 COMPex 201 10 400 4 COMPex 205 50 400 15 COMPex 50 FBG 248 100 140 12 COMPex 50 50 150 7 COMPex 102 20 400 8 COMPex 110 100 400 30 COMPex 201 10 750…

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…e.g. 26 mm x 0.5 mm, which covers a 2" wafer in only two scans and takes
four scans for the commonly used 4" wafer. With a laser power of 30 W at 248 nm, these
systems already reach a high throughput since the laser processing takes only 10 seconds per
4" wafer. With higher power and…

COHR IndyStar DS 0818 7.pdf

COHR IndyStar DS 0818 7.pdf

…193
1 kHz
IndyStar 193
2 kHz
IndyStar 248
1 kHz
IndyStar 248
2 kHz
Wavelength (nm) 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2…

IndyStar Excimer Laser

IndyStar Excimer Laser

…193
1 kHz
IndyStar 193
2 kHz
IndyStar 248
1 kHz
IndyStar 248
2 kHz
Wavelength (nm) 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…193
1 kHz
IndyStar 193
2 kHz
IndyStar 248
1 kHz
IndyStar 248
2 kHz
Part Number 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2…

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf


LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz)…

COHR LEAPseries DS 0819 5.pdf

COHR LEAPseries DS 0819 5.pdf


LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz)…

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

…100K 150K
LEAP
100C 150C
LEAP
300C
Wavelength (nm) 248 308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz)…

Global ISO 17025 ANAB Certificate Exp Mar2020 09-17-20 18.pdf

Global ISO 17025 ANAB Certificate Exp Mar2020 09-17-20 18.pdf

…10 nW to 30 mW
51 nA to 19.1 mA
0.8 % of reading Current Source
Electrical Calibration of Laser
Energy Meters
100 nJ to 3 J
40 µV to 5 V
0.8 % of reading ARB, Attenuator
Laser Power Measuring
Sensors at 514 nm -Measure
(0.18 to 1.2) W
(0.000…

COHR COMPexSeries DS 0618 8.pdf

COHR COMPexSeries DS 0618 8.pdf


500
300
Max. Rep. Rate (Hz) 100 50 20 100 10 50
Average Power2 (W) 193
248
308
351
-
12
-
-
4
7
-
-
4.8
8
5
4
12
30
16
12
4
7.5
3.5
3
15
33
20
15…

Global ISO 17025.2017 ANAB Certificate  Scope Exp.Mar2020.pdf

Global ISO 17025.2017 ANAB Certificate Scope Exp.Mar2020.pdf

…10 nW to 30 mW
51 nA to 19.1 mA
0.8 % of reading Current Source
Electrical Calibration of Laser
Energy Meters
100 nJ to 3 J
40 µV to 5 V
0.8 % of reading ARB, Attenuator
Laser Power Measuring
Sensors at 514 nm -Measure
(0.18 to 1.2) W
(0.000…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…BIP-12F (1:1) BIP-5000Z BIP-5000SPL
Wavelength (nm) 10 to 355 10 to 320 10 to 320
Aperture (mm) Ø12 30 x 40 Ø50
Resolution (camera-dependent)(µm) 20 70 -
Saturation
at 193 to 248 nm 10 mJ/cm2 30 mJ/cm2 -
at 308 nm 50 mJ/cm2 50 mJ/cm2 -
Sensitivity 5 µJ/cm2 5 µJ/cm2…

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Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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