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248 Nm 30 W

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…e.g. 26 mm x 0.5 mm, which covers a 2" wafer in only two scans and takes
four scans for the commonly used 4" wafer. With a laser power of 30 W at 248 nm, these
systems already reach a high throughput since the laser processing takes only 10 seconds per
4" wafer. With higher power and…

COHR IndyStar DS 0818 7.pdf

COHR IndyStar DS 0818 7.pdf

…193
1 kHz
IndyStar 193
2 kHz
IndyStar 248
1 kHz
IndyStar 248
2 kHz
Wavelength (nm) 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2…

IndyStar Excimer Laser

IndyStar Excimer Laser

…193
1 kHz
IndyStar 193
2 kHz
IndyStar 248
1 kHz
IndyStar 248
2 kHz
Wavelength (nm) 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…193
1 kHz
IndyStar 193
2 kHz
IndyStar 248
1 kHz
IndyStar 248
2 kHz
Part Number 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2…

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf


LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz)…

COHR LEAPseries DS 0819 5.pdf

COHR LEAPseries DS 0819 5.pdf


LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz)…

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

…100K 150K
LEAP
100C 150C
LEAP
300C
Wavelength (nm) 248 308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz)…

Global ISO 17025 ANAB Certificate Exp Mar2020 09-17-20 18.pdf

Global ISO 17025 ANAB Certificate Exp Mar2020 09-17-20 18.pdf

…10 nW to 30 mW
51 nA to 19.1 mA
0.8 % of reading Current Source
Electrical Calibration of Laser
Energy Meters
100 nJ to 3 J
40 µV to 5 V
0.8 % of reading ARB, Attenuator
Laser Power Measuring
Sensors at 514 nm -Measure
(0.18 to 1.2) W
(0.000…

COHR COMPexSeries DS 0618 8.pdf

COHR COMPexSeries DS 0618 8.pdf


500
300
Max. Rep. Rate (Hz) 100 50 20 100 10 50
Average Power2 (W) 193
248
308
351
-
12
-
-
4
7
-
-
4.8
8
5
4
12
30
16
12
4
7.5
3.5
3
15
33
20
15…

Global ISO 17025.2017 ANAB Certificate  Scope Exp.Mar2020.pdf

Global ISO 17025.2017 ANAB Certificate Scope Exp.Mar2020.pdf

…10 nW to 30 mW
51 nA to 19.1 mA
0.8 % of reading Current Source
Electrical Calibration of Laser
Energy Meters
100 nJ to 3 J
40 µV to 5 V
0.8 % of reading ARB, Attenuator
Laser Power Measuring
Sensors at 514 nm -Measure
(0.18 to 1.2) W
(0.000…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…BIP-12F (1:1) BIP-5000Z BIP-5000SPL
Wavelength (nm) 10 to 355 10 to 320 10 to 320
Aperture (mm) Ø12 30 x 40 Ø50
Resolution (camera-dependent)(µm) 20 70 -
Saturation
at 193 to 248 nm 10 mJ/cm2 30 mJ/cm2 -
at 308 nm 50 mJ/cm2 50 mJ/cm2 -
Sensitivity 5 µJ/cm2 5 µJ/cm2…

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf

EnergyMax-USB-RS-Sensors-Guide FORMFIRST.pdf


below. At other wavelengths it is safe to interpolate between the listed values.
Damage Threshold (mJ/cm2)
Model 193 nm 248 nm 266 nm 355 nm 532 nm 1064 nm
J-50MB-HE 40 170 170 140 250 500
J-50MB-LE 40 170 170 140 250 500
J-25MB-HE 40 170 170 140 250 500
J-25MB-LE…