Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

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FBG

UV

FBG

FBG
248nm 193nm
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LASIK

40

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Industrial Laser Solutions - September/October 2015

…308
or 248nm excimer lasers, allowing it to be
matched to the absorption characteristics
of the particular materials in use. The high
pulse energy (over 1J) and repetition rate
(300Hz) provide rapid throughput of feature sizes down to 3µm. In addition, excimer laser ablation…

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ILS Japan 2017-09 - OPE Electronics.pdf

UV

308nm

FWHMFull Width at Half Maxi
mum
25ns
200J/cm2

UV

350nm

308nm
248nm

1

1%

UV
1 5m2

1

September 2017 Industrial Laser Solutions Japan 13

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LLO WavelengthAdvantage.pdf

…has to be provided to decompose the GaN into metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light interferometry image of a gallium…

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