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248nm

ILS Japan 2017-09 - OPE Electronics.pdf

ILS Japan 2017-09 - OPE Electronics.pdf

UV

308nm

FWHMFull Width at Half Maxi
mum
25ns
200J/cm2

UV

350nm

308nm
248nm

1

1%

UV
1 5m2

1

September 2017 Industrial Laser Solutions Japan 13

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…moved, and then ablated
again, until all the desired areas have
been patterned.
This system is available with either 308
or 248nm excimer lasers, allowing it to be
matched to the absorption characteristics
of the particular materials in use. The high
pulse energy…

LLO WavelengthAdvantage.pdf

LLO WavelengthAdvantage.pdf

…metallic gallium. Due to these requirements, the excimer laser, especially the KrF excimer laser operating at 248 nm, is the first choice for LLO. 248nm line sapphire wafer separation The figure below is a white light interferometry image of a gallium nitride (GaN) epi-wafer after LLO processing and…