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1.    GlobalSemiArt2Rev2 Best match in this PDF  |  All matches in this PDF ... , which supports mask inspection for the 130nm node. Detection of smaller defects requires shorter wavelengths. The frequency-doubled argon laser at 257nm or the frequency-quadrupled Nd:YAG laser at 266nm are the probable successors, at least through the 90nm technology node, and inspection tools based ... Related Searches: 355 nm | laser direct imaging

2.    Innova300CmotoFredDatasheet Best match in this PDF  |  All matches in this PDF ... ) Power Supply (optional)3 Crated 67 kg (147 lb), Uncrated 39 kg (86 lb) INNOVA 300C MOTOFRED Coherent Laser Division Continous-Wave Ion Wavelength (nm) Power (W) Wavelength (nm) Power (W) Multiline Visible 5.00 264.3 0.02 264.3 0.02 528.7 0.35 257.2 0.10 257.2 0.20 514.5 2.00 250.8 0.015 250.8 0.03 ... Related Searches: motofred | 300c | innova 300c

3.    GlobalSemiArt2Rev2  (PAGE 2 OF 2) ... laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007 65 nm 2010 45 nm Lithography Excimer: 248 nm Excimer: 193 nm Excimer: 193 nm Excimer: 193 nm EUV 13.4 nm Photomask Writing Excimer: 248 nm Frequency ... Related Searches: 355 nm

4.    SemiManufMagRev2 Best match in this PDF  |  All matches in this PDF ... . LITHOGRAPHY A tremendous amount has been written about the possible future path of lithography. What's clear is that lithography based on the 248 nm excimer laser has become mainstream and will probably take the industry through to the 90 nm technology node. Furthermore, 193 nm excimer laser-based ... Related Searches: mopa | 355 nm cw | indigo | wafer inspection

5.    SemiManufMagRev2  (PAGE 2 OF 5) ... O L O G Y M A R C H 2 0 0 5 s e m i m f g . c o m TA B L E 1 Lasers in the ITRS 1st Year of Production Technology Node Application 2004 2007 2010 90 nm 65 nm 45 nm Lithography Excimer at 248 nm Excimer at 193 nm Excimer at 193 nm Excimer at 193 nm EUV 13.4 nm Photomask Writing Excimer at 248 nm Excimer ... Related Searches: 355 nm

6.    SemiManufMagRev2  (PAGE 3 OF 5) ... N D U C T O R M A N U F A C T U R I N G M A R C H 2 0 0 5 earliest implementations of this technique used either the krypton laser operating at 413 nm or the argon laser at 364 nm. Over the past few years, use of the frequency-doubled argon laser, with output at 257 nm, has enabled the technique to ... Related Searches: argon laser | krypton laser

7.    microelectrdetectionRev2 Best match in this PDF  |  All matches in this PDF ... thinfilm diagnostics based on photonacoustic pulses. Upstream of chip production, laser-based tools help to qualify lens materials for 193- and 157-nm lithography steppers. Downstream, they help inspect features on printed circuit boards. Although the scope and scale of laser-based metrology in the ... Related Searches: reticles | 257

8.    SemiManufMagRev2  (PAGE 4 OF 5) However, an even shorter wavelength laser will probably be required to support the 65 nm node. One option currently under development uses a technique called sum-frequency mixing to produce more than 100 mW of high-quality output at 198 nm. Specifically, this approach requires mixing the output of ... Related Searches: wafer cutting

9.    microelectrdetectionRev2  (PAGE 4 OF 4) doubled argon-ion lasers at 257 nm. Solid-state instruments are more compact and place a lighter burden on power consumption and cooling functions. Generally, these lasers are based on Nd:YAG or Nd:vanadate technology doubled to emit at 532 nm. A resonant enhancement cavity doubles this wavelength ... Related Searches: vanadate

10.    AzureBrochure Best match in this PDF  |  All matches in this PDF The reliable way to move into the UV. Coherent Laser Division Solid-State Continuous-Wave AZUREThe Azure 266 nm CW Deep-UV Laser Put unsurpassed expertise to work for you. In your demanding manufacturing environment, unforeseen downtime can deal a crippling blow to your productivity--and to your profitability ... Related Searches: uv lasers | innova | 266nm cw laser | deep uv

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