1 - 10 of 22 Search Results for 257 nm laser
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5.
03 T Coherent.42-46
(PAGE 2 OF 5)
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…lithography lasers. These older MOPA lasers typically use a single-pass amplifier and a separate pulser for the oscillator and amplifier - an arrangement that produce short pulses and whose ASE performance is very sensitive to timing jitter. PHOTOMASK WRITING Laser-based writing…
Related Searches: acousto-optic modulator
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6.
Microsoft Word - GlobablSemiArt.doc
(PAGE 2 OF 2)
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…effective. Laser manufacturers, such as Coherent, have focused their efforts on improving these areas and on matching laser characteristics to meet the specific needs of the roadmap. Lasers in the ITRS 1st Year of Production Technology Node Application 2004 90 nm 2007…
Related Searches: 257 nm | 193 nm laser | 355 nm
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8.
03 T Coherent.42-46
(PAGE 3 OF 5)
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…either the krypton laser operating at 413 nm or the argon laser at 364 nm.Over the past few years, use of the frequency-doubled argon laser, with output at 257 nm, has enabled the technique to support mask writing of smaller features. Frequency-doubled argon ion lasers produce wavelengths…
Related Searches: 257 nm
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