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1.    GlobalSemiArt2Rev2 Best match in this PDF  |  All matches in this PDF …which supports mask inspection for the 130nm node. Detection of smaller defects requires shorter wavelengths. The frequency-doubled argon laser at 257nm or the frequency-quadrupled Nd:YAG laser at 266nm are the probable successors, at least through the 90nm technology node, and inspection tools based… Related Searches: 355 nm | diode-pumped solid-state | 266 nm

2.  Microsoft Word - GlobablSemiArt.doc  (PAGE 1 OF 2) …supports mask inspection for the 130nm node. Detection of smaller defects requires shorter wavelengths. The frequency-doubled argon laser at 257nm or the frequency-quadrupled Nd:YAG laser at 266nm are the probable successors, at least through the 90nm technology node, and inspection tools… Related Searches: 364nm

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Search Suggestions: 355 nm | diode-pumped solid-state | 266 nm

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