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3 Sigma

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


3
15
33
20
15
Energy Stability3 (1 sigma) (%) 0.75
Pulse Duration (FWHM) (ns) 20 20 20 20 25 25
Beam Dimensions (V x H, FWHM) (mm2) 12 x 4.5 14 x 5 24 x 10 24 x 10 24 x 10 24 x 10
Beam Divergence3 (V x H, FWHM) (mrad2) 0.3 x 0.2 2 x 1 3 x 1 3 x 1 3 x 1 3

RAPID NX Laser

RAPID NX Laser


* High beam quality M2 100:1 Polarisation direction Vertical ± 3 degrees IR Contrast ratio > 100:1 Defined as the energy ratio of the main pulse and first post pulse Pulse stability (RMS) < 1% at 1 MHz Measured over 1000 pulses - 1 sigma Pulse stability (pk-pk) < 5% For 1000 consecutive pulses Power…

COMPex excimer laser

COMPex excimer laser

3 COMPex 205 50 300 15 Datasheet COMPex Applications Application Process Material Pulsed Laser Deposition Polymer Marking Laser Lift-Off Engraving Heat Treating Plastic Semiconductor Ceramic --> Features & Benefits COMPex Features & Benefits UV-energy stability better than 0.75% (1 Sigma)

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf

…150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2 1.2 1.2
Pulse Duration (FWHM) (ns) 29 ±5 22 ±5 32 ±5 27 ±5 29 ±5 32 ±5
Beam Dimensions (V x H, FWHM) (mm2) 32 ±3.5 x 13 ±4 33 ±3.5 x 13 ±4 32 ±3.5 x 13 ±4 33 ±3.5 x 13 ±4 37 ±3.5 32 ±3.5
x 13 ±3 x 15 ±4
Divergence (V x H, FWHM)…

COHR COMPexSeries DS 0618 8.pdf

COHR COMPexSeries DS 0618 8.pdf


3
15
33
20
15
Energy Stability3 (1 sigma) (%) 0.75
Pulse Duration (FWHM) (ns) 20 20 20 20 25 25
Beam Dimensions (V x H, FWHM) (mm2) 12 x 4.5 14 x 5 24 x 10 24 x 10 24 x 10 24 x 10
Beam Divergence3 (V x H, FWHM) (mrad2) 0.3 x 0.2 2 x 1 3 x 1 3 x 1 3 x 1 3

Excimer laser technology trends

Excimer laser technology trends

J. Phys. D: Appl. Phys. 47 (2014) 034004 R Delmdahl and R P¨
atzel
Figure 3. Dual plate attenuator layout (left) and plate angle dependent optical transmission (right).
Figure 4. Pulse energy distribution of laser pulses at low pulse frequency and high laser energy.
Hence, the…

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…Power (W) 500 600
Maximum Repetition Rate (Hz) 500 600
Energy Stability (sigma, %) 0 .45 1
Pulse Duration (FWHM) (ns) 24 ±4 24 ±4
Beam Dimensions2 (FWHM, V x H, mm2) 35 ±4 x 14.5 ±3 35 ±4 x 14.5 ±3
Beam Divergence (FWHM, V x H, mrad2) 4.5 x 1 4.5 x 1.5
Dynamic Gas…

THz-Raman Spectroscopy for Explosives%2C Chemical and Biological Detection.pdf

THz-Raman Spectroscopy for Explosives%2C Chemical and Biological Detection.pdf

…XIV, 87100M (May 29, 2013); doi:10.1117/12.2018095
Figure 4b. A close-up of the low-frequency Stokes and anti-Stokes spectra of Form 2, Form 3 and the Hydrate
form of CBZ.
4.2 Explosives and Drug Detection
Raman has been increasingly used for identification of explosives and…

EU LTJ Ultrashort Pulses Improving the Process.pdf

EU LTJ Ultrashort Pulses Improving the Process.pdf

…of 99.99%. For
critical dimensions in mass produced
parts, an excellent target for C
pk
is in the
2.0 - 2.5; values over 3.0 may indicate an
overly constrained process with unnecessary costs. For a parameter with only
a USL (or LSL), as in the case of edge

Improving and Quantifying the Process Window

Improving and Quantifying the Process Window

…of 99.99%. For
critical dimensions in mass produced
parts, an excellent target for C
pk
is in the
2.0 - 2.5; values over 3.0 may indicate an
overly constrained process with unnecessary costs. For a parameter with only
a USL (or LSL), as in the case of edge

COHR ExciStar DS 0318 6.pdf

COHR ExciStar DS 0318 6.pdf

…248 nm/500 Hz
0.0 0
1
2
3
4
5
6
7
8
9
10
4.0
8.0
12.0
16.0
20.0
600 700 800 900 1000 1100 1200 1300 1400 1500 1600
Pulse Energy (mJ)
Energy Stability (1 sigma, %)
Sigma(U)/193 nm
E(U)/248 nm

COHR ExciStar DS 1018 7.pdf

COHR ExciStar DS 1018 7.pdf

…248 nm/500 Hz
0.0 0
1
2
3
4
5
6
7
8
9
10
4.0
8.0
12.0
16.0
20.0
600 700 800 900 1000 1100 1200 1300 1400 1500 1600
Pulse Energy (mJ)
Energy Stability (1 sigma, %)
Sigma(U)/193 nm
E(U)/248 nm

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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