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308nm Laser Source

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…pulsed laser technology. They can produce several discrete wavelengths throughout the UV; depending on the gas
combination, emission ranges from 157 to 348 nm. The deep-UV line at 193 nm is the most widely used source for lithography processes in the semiconductor
industry. The 308-nm