1 - 10 of 20 Search Results for 364 nm
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2.
Coherent #7.qxd
(PAGE 4 OF 4)
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…that have a high degree of color variation. More significantly, this method requires only a water-cooled argon-ion laser emitting at 364 nm. With each new generation, inspection sources confront contraMicroelectronics Inspection dictory demands. Detecting smaller defects…
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4.
03 T Coherent.42-46
(PAGE 4 OF 5)
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… Today's state-of-the-art patterned wafer inspection tools rely on the 364 nm output of the water-cooled argon laser as the best balance of these factors. The frequency-doubled argon laser at 257 nm is an obvious next step in the progression. An interesting alternative laser…
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5.
03 T Coherent.42-46
(PAGE 3 OF 5)
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…413 nm or the argon laser at 364 nm.Over the past few years, use of the frequency-doubled argon laser, with output at 257 nm, has enabled the technique to support mask writing of smaller features. Frequency-doubled argon ion lasers produce wavelengths as short as 229 nm, and…
Related Searches: 257 nm
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8.
PhotoniquesRev2
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…LDI (Laser Direct Imaging - imagerie directe par laser), d'abord rendue possible par les lasers à argon émettant dans l'ultraviolet (à 351 et 364 nm), améliore significativement l'uniformité d'exposition et le rendement, en particulier pour les circuits de grande précision, mais la source elle…
Related Searches: vecsel
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9.
PH18_JUIN_Coherent
(PAGE 2 OF 3)
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…Imaging - imagerie directe par laser), d'abord rendue possible par les lasers à argon émettant dans l'ultraviolet (à 351 et 364 nm), améliore significativement l'uniformité d'exposition et le rendement, en particulier pour les circuits de grande précision, mais la…
Related Searches: vecsel
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