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4600 Nm

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…3
Table 1. LLO system line-up and specifications overview.
UV blade UV blade UV blade UV blade
250 380 465 750
Wavelength
(nm)
308 308 308 308
Pulse energy
(mJ)
580 580 900 950
Repetition rate
(Hz)
200 200 300 300
Energy density