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Annealing For Advanced Displays

VYPER Series Lasers

VYPER Series Lasers

--> VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer…

Excimer Lasers

Excimer Lasers

…tools for high-quality UV microprocessing. They are offered at 193 nm, 248 nm, and 308 nm. VYPER VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Related Materials Videos UVblade - Solutions for Flexible Display

ILS Annealing.PDF

…in
display production.
Flat-panel basics
The two most common technologies currently in use for
flat-panel displays are active matrix liquid-crystal displays
(AMLCDs) and active-matrix organic light-emitting diode
(AMOLED) displays. Both of these display types utilize…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…RAINER PAETZEL and RALPH DELMDAHL COHERENT INC. Testing the Limits of Excimer Lasers: Annealing for Advanced Displays Tech Feature Images courtesy of Coherent Inc. High-power scaling for large format poly-Si annealing shown here with two dual-oscillator VYPER lasers, with all four beams merging into…

EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…of applications. In terms of sales volume, the single
biggest is Excimer Laser Annealing (ELA) for the
flat panel display market."
virtually all advanced smartphones.
The products we supply for ELA are
our VYPER excimer lasers and line
beam optics, comprising LineBeam…

Coherent

Coherent

…$0.5 million decrease in sales of our other SLS products primarily due to lower shipments
for scientific and government programs, solar, advanced packaging, medical and semiconductor
applications partially offset by higher revenue for flat panel display annealing applications.
51

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…and technology development for advanced display products is breathtaking. While large-scale investment in OLED display production is ongoing in Korea and China, there is already a new technology that may challenge LCD and OLED displays in some segments. Specifically, displays comprised of micro-LEDs…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…Processing Applications
Annealing:
Annealing is widely used to improve the characteristics of ma
terials,
in particular thin films, with applications extending from wafer scale
to large substrates. Laser annealing can activate dopants for advanced
CMOS circuitry,…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


· Laser data acquisition to allow
advanced process control
· Sealed and purged beam path
for stable long term operation
· Ethernet interface for control
and fast data acquisition
APPLICATIONS
· Excimer Laser Annealing
· Pulsed Laser Deposition
VYPER…

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf

…· EquiSwitch synchronization to provide lowest jitter · Laser data acquisition to allow advanced process control · Sealed and purged beam path for stable long term operation · Ethernet interface for control and fast data acquisition APPLICATIONS · Excimer Laser Annealing · Pulsed Laser Deposition

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf


· Laser data acquisition to allow
advanced process control
· Sealed and purged beam path
for stable long term operation
· Ethernet interface for control
and fast data acquisition
APPLICATIONS
· Excimer Laser Annealing
· Pulsed Laser Deposition
VYPER…

an rep 2018 workfile 02

an rep 2018 workfile 02

…ppi) for high end smart phones, and hold the potential for deployment in tablet,
laptop and OLED TV displays. Excimer based LTPS is also enabling flexible OLED displays which
have recently undergone rapid growth as they have been adopted into smart phones.
A modern flat panel display