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Beam Profile Excimer

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…Optionally, the LLO systems feature a CCD (Charge Coupled Device) beam profiler camera for measuring the line
beam profile at the substrate plane.
By appropriately moving the substrate under the pulsing excimer laser line beam field in one or two scans,
it is possible to cover an…

Laser Focus World - August 2016

Laser Focus World - August 2016


to produce the required line beam shape.
Moreover, the details of the beam profile
(e.g., linearity, uniformity) have a major
impact on process throughput and, hence,
cost. To this end, Coherent developed strategic partnerships with beam delivery experts, and also brought…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…Spectra September 2016 www.photonics.com
form poly-Si is commonly referred to as
excimer laser annealing (ELA).
In ELA, the excimer output beam is reshaped into a long narrow line profile. The
length of the line ideally matches either the
half or full width of the panel;…

Energy Max Laser Sensors

Energy Max Laser Sensors

…FieldMaxII due to the high repetition rate. Contact Us About This Product PRICE HERE Close All Energymax Laser Sensors Products Excimer Laser EnergyMax Sensors Excimer Laser EnergyMax Sensors EnergyMax sensors for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. High accuracy and…

ILS Annealing.PDF

…passes under the laser beam. This is critical to achieving the process utilization and rapid throughput necessary for
economically viable LTPS.
The excimer laser beam profile is also homogenized to
construct a highly uniform (so-called "top hat") profile along
its entire length…

Excimer Laser EnergyMax Sensors

Excimer Laser EnergyMax Sensors

…cable with bend and strain relief protects against rough handling Coherent Excimer Laser EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. Excimer Laser EnergyMax Series sensors feature high accuracy and large active area (up…

LineBeam systems

LineBeam systems

…Application Process Material Excimer Laser Annealing Surface Modification Semiconductor --> Features & Benefits LineBeam Model LineBeam 750 LineBeam 1000 LineBeam 1300 LineBeam 1500 Wavelength (nm) 308 308 308 308 Line Beam Length (mm) 750 1000 1300 1500 Beam Profile Type Top-hat along both axes…

Air-Cooled Thermopile Sensors 150W (RoHS)

Air-Cooled Thermopile Sensors 150W (RoHS)

…to 150W (RoHS) Convection, air-cooled thermopile sensors for measuring laser power to 150W.

Key Features:
* 10 mW to 150W range
* Broadband and Excimer coatings
* Convective air-cooled
* 0.15 µm to 11 µm spectral range
* 19 mm and 50 mm diameter active areas
* RoHS Compliant Contact Us About This…

LaserCam-HR II

LaserCam-HR II

beam profiling system for applications from 190 nm to 355 nm. This UV model is robust when used with the harsh UV wavelengths that often degrade typical beam diagnostic cameras. The cameras include Coherent’s BeamView software package, long recognized as a flexible, fast, and user-friendly beam

LaserCam HR-InGaAs

LaserCam HR-InGaAs

…involving flat top beam shapes. These BeamView-USB calculations may assist in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau Uniformity • Flatness Factor • Edge Steepness • Beam Uniformity • Effective…

Microelectronics

Microelectronics

…resistors, semiconductor alloys, carbon nano-tubes, and more. Although visible or IR laser beams have been used for PLD applications, UV beams are now most commonly employed. Among UV pulsed lasers, excimer lasers provide a variety of short wavelengths combined with energy levels that fit perfectly…

Life Sciences and Medical Applications

Life Sciences and Medical Applications

…surgery. Myopia, astigmatism, and hyperopia can all be treated effectively with the non-thermally damaging and precisely controllable ArF excimer laser beam. This technique has already helped millions of people since the early 1990s to enjoy life without glasses or contact lenses. Coherent is the…

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