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Compex 200

COMPex excimer laser

COMPex excimer laser

…4 COMPex 205 50 400 15 COMPex 50 FBG 248 100 140 12 COMPex 50 50 150 7 COMPex 102 20 400 8 COMPex 110 100 400 30 COMPex 201 10 750 7.5 COMPex 205 50 750 33 COMPex 102 308 20 250 5 COMPex 110 100 250 16 COMPex 201 10 500 5 COMPex 205 50 500 20 COMPex 102 351 20 200 4 COMPex 110 100 200 12 COMPex 201…

COHR COMPexSeries DS 0618 8.pdf

COHR COMPexSeries DS 0618 8.pdf

…in.)
603.0 mm
(23.74 in.)
COMPex 200
Connection
Side View
Connection
Side View
Beam Exit
Side View
Beam Exit
Side View
Service Side View
Service Side View
COMPex Datasheet
MECHANICAL SPECIFICATIONS
COMPex 50/100

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…Kit (VCR gas connections instead of Gyrolok)
Pre-mounted Output Coupler for quick optics exchange, COMPex 100/200
Pre-mounted Rear Mirror for quick optics change, 248 nm
Low-Divergence Optics, 248 nm, COMPex 200
Low-Divergence Optics Adapter, COMPex 100/200
COMPex

Microelectronics

Microelectronics

…in higher deposition efficiency. Finally, higher pulse energy provides a larger process window, allowing a more consistent process. Coherent’s COMPex and LEAP laser series are designed for demanding high-pulse energy applications and are highly effective tools for pulsed laser deposition. They…

COHR COMPexSeries DS 1219 2.pdf

COHR COMPexSeries DS 1219 2.pdf

…mm
(23.74 in.)
COMPex 200
Connection
Side View
Connection
Side View
Beam Exit
Side View
Beam Exit
Side View
Service Side View
Top View
Service Side View
Top View
COMPex Datasheet
COMPex 50/100
MECHANICAL…