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Corona

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…974x381x838mm(38.35x14.96x32.95in.) Specifications Key Features Customer Benefits · Industrial Design with Semi-S2-certificate · High uptime · Low maintenance · Corona Preionization · Homogeneous beam profile · Solid-State Pulser · "Soft" discharge for better pointing and energy stability · No…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…www.coherent. com, and MATTHEW GINGERELLA (matthew. gingerella@suss.com) is an international product specialist at SÜSS MicroTec Photonic Systems, Corona, CA, www.suss.com. FIGURE 4. Conductive structures are plated on top of a seed metal layer (a). The excimer laser energy is absorbed by the seed…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…· Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation · Energy Monitor · Preset stabilized…

ExciStar XS

ExciStar XS

…XS Key Feature Customer Benefit Ultra-Compact Low investment costs Lightweight Design Flexible integration Almeta Tube Extended tube lifetime Corona Preionization Stable, homogeneous output Solid-State Switch Maintenance-free operation Energy Monitor Preset, stabilized energy output Ultra-Compact,…

IndyStar

IndyStar

…Material Photomask Inspection Semiconductor --> Features & Benefits IndyStar Key Feature Customer Benefit Semi-S2 Certified Design High uptime Corona Preionization Stable, homogeneous output Solid-State Switch Maintenance-free operation Almeta Tube Extended tube lifetime PowerLok Smooth burst…

LAMBDA SX

LAMBDA SX

…hand-held control panel Solid-State Switch Maintenance-free operation Purged, External Resonator Design Highest beam stability and optics lifetime Corona Preionization Stable, homogeneous output Metal Ceramic Tube Extended tube lifetime Energy Monitor Preset, stabilized energy output Accessories…

VYPER

VYPER

…hand-held control panel Solid-State Switch Maintenance-free operation Purged, External Resonator Design Highest beam stability and optics lifetime Corona Preionization Stable, homogeneous output Metal Ceramic Tube Extended tube lifetime Energy Monitor Preset, stabilized energy output Accessories…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

…Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and all-solid-state-pulser · Standalone and OEM version · Air cooling, single phase · Use of premix laser gas · RoHS compliant…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

…Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and all-solid-state-pulser · Standalone and OEM version · Air cooling, single phase · Use of premix laser gas · RoHS compliant…

ExciStarXS 200&500 DS

ExciStarXS 200&500 DS

…Available for 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Repetition rates up to 200 Hz and 500 Hz · New tube design "Almeta XS" · Equipped with corona preionization and all-solid-state-pulser · Standalone and OEM version · Air cooling, single phase · Use of premix laser gas · RoHS compliant…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…974x381x838mm(38.35x14.96x32.95in.) Specifications Key Features Customer Benefits · Industrial Design with Semi-S2-certificate · High uptime · Low maintenance · Corona Preionization · Homogeneous beam profile · Solid-State Pulser · "Soft" discharge for better pointing and energy stability · No…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…· Almeta XS Tube Design · Extended tube lifetime · High pulse-to-pulse stability · Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths · Corona Preionization · Homogeneous beam profile · Solid-State Switch · Immediate operation · Maintenance-free operation · Energy Monitor · Preset stabilized…

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