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Cryostatic Gas Purifier

Excimer laser technology trends

Excimer laser technology trends

…can be largely removed by a cryostatic gas purifier. Some of the cleaned gas is used to flush the windows of the laser tube in order to prevent the deposition of impurities. A further gas lifetime increasing measure is to add additional halogen gas to the laser gas mixture when the laser output…

Excimer laser technology trends

Excimer laser technology trends

…can be largely removed by a cryostatic gas purifier. Some of the cleaned gas is used to flush the windows of the laser tube in order to prevent the deposition of impurities. A further gas lifetime increasing measure is to add additional halogen gas to the laser gas mixture when the laser output…

Excimer laser technology trends

Excimer laser technology trends

…can be largely removed by a cryostatic gas purifier. Some of the cleaned gas is used to flush the windows of the laser tube in order to prevent the deposition of impurities. A further gas lifetime increasing measure is to add additional halogen gas to the laser gas mixture when the laser output…

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