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Related Categories: 248nm Laser | Polyimide

Delmdahl

07(IK14-10)p.53-57.fm

07(IK14-10)p.53-57.fm

…Print ISSN 1226-9360 Online ISSN 2287-7525 53 Laser Drilling of High-Density Through Glass Vias (TGVs) for 2.5D and 3D Packaging Ralph Delmdahl and Rainer Paetzel Coherent Laser Systems GmbH & Co. KG (Received May 21, 2014: Corrected June 19, 2014: Accepted June 19, 2014) Abstract:…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

New excimer lasers advance coated conductor upscaling R Delmdahl1 Coherent GmbH, Hans-Böckler-Str.12, 37079 Göttingen, Germany E-mail: ralph.delmdahl@coherent.com Abstract. High power excimer lasers designed for use in pulsed laser deposition (PLD) of thin films, including coated conductor layers…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

New excimer lasers advance coated conductor upscaling R Delmdahl1 Coherent GmbH, Hans-Böckler-Str.12, 37079 Göttingen, Germany E-mail: ralph.delmdahl@coherent.com Abstract. High power excimer lasers designed for use in pulsed laser deposition (PLD) of thin films, including coated conductor layers…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

equipment together with mature and reliable excimer lasers technologically drive PLD thin film industrialization on both wafer and tape substrate geometries. 3. Commercialization potential Further establishing the PLD method on the coated conductor reel-to-reel production floor particularly demands…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

Against this background, coated conductor manufacturing unit lengths need to evolve from the current hundreds of meters to a kilometer in length and beyond and this without sacrificing the overall end-toend current density performance of the tape. HTS market projections are that for 2G HTS tapes…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

frequently employed for high UV energy industrial applications, since these yield precise lasermaterial-interaction and at the same time optimum laser optics lifetime. 5. Increasing the deposition rate via the laser pulse frequency Next to requiring sufficient output energy being intense enough to…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

Table 1. Performance specifications of LAMBDA SX 300 and 600 Hz excimer laser models at 248 and 308 nm. Laser Model LSX 200K LSX 300K LSX 200C LSX 300C LSX 540C Wavelength: 248 nm 308 nm Max. Stab. Energy: 670 mJ 1000 mJ 670 mJ 1000 mJ 900 mJ Max. Stab. Power: 200 W 300 W 200 W 300 W 540 W Max. Rep.…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

equipment together with mature and reliable excimer lasers technologically drive PLD thin film industrialization on both wafer and tape substrate geometries. 3. Commercialization potential Further establishing the PLD method on the coated conductor reel-to-reel production floor particularly demands…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

Against this background, coated conductor manufacturing unit lengths need to evolve from the current hundreds of meters to a kilometer in length and beyond and this without sacrificing the overall end-toend current density performance of the tape. HTS market projections are that for 2G HTS tapes…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

frequently employed for high UV energy industrial applications, since these yield precise lasermaterial-interaction and at the same time optimum laser optics lifetime. 5. Increasing the deposition rate via the laser pulse frequency Next to requiring sufficient output energy being intense enough to…

Microsoft Word - JPCS Delmdahl final

Microsoft Word - JPCS Delmdahl final

Table 1. Performance specifications of LAMBDA SX 300 and 600 Hz excimer laser models at 248 and 308 nm. Laser Model LSX 200K LSX 300K LSX 200C LSX 300C LSX 540C Wavelength: 248 nm 308 nm Max. Stab. Energy: 670 mJ 1000 mJ 670 mJ 1000 mJ 900 mJ Max. Stab. Power: 200 W 300 W 200 W 300 W 540 W Max. Rep.…

Microsoft Word - FUN 12 R DELMDAHL revised.doc

Microsoft Word - FUN 12 R DELMDAHL revised.doc

Pulsed laser deposition - UV laser sources and applications R. Delmdahl
*
, and R. Pätzel
*
* Coherent GmbH, Hans-Böckler-Str. 12, D-37079 Göttingen, Germany PACS 42.55.Lt, 52.38.Mf, 81.15.Gh
* Corresponding author: e-mail ralph.delmdahl@coherent.com, Phone: +49 551 6938 391, Fax: +49 551 6869 1
*
*…

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