September 2017 Industrial Laser Solutions Japan 15
30 -- 2017 3 www.industrysourcing.cn " """ 1 Coherent 308 nm 25ns 200 J/cm2 Ralph Delmdahl , (Coherent) 350nm 308 nm 248 nm 1% 1 5 1 250 mm 750 mm 2 0.4 mm 250 mm 1 cm2 750 mm 3 cm2 1 Technology Reports
…Print ISSN 1226-9360 Online ISSN 2287-7525 53 Laser Drilling of High-Density Through Glass Vias (TGVs) for 2.5D and 3D Packaging Ralph Delmdahl and Rainer Paetzel Coherent Laser Systems GmbH & Co. KG (Received May 21, 2014: Corrected June 19, 2014: Accepted June 19, 2014) Abstract:…
and microelectronics manufacturing; email:
firstname.lastname@example.org. Ralph Delmdahl
is product marketing manager for the Coherent
Excimer Business Group. Delmdahl received
his Ph.D. in physical chemistry from the
Braunschweig University of Technology…
fast debonding of carrier wafers up to
300 mm diameter as well as for detaching large display glass substrates.
Ralph Delmdahl is
Manager for Coherent.
He joined Coherent
in 2000 as Product
Manager for industrial
4 R. Delmdahl et al.
Figure 6. PI-coated glass substrate delaminated via LLO at
PI film was easily and cleanly delaminated without the need
for any post-processing.
The lift-off performance and process quality depended
first and foremost on the employed energy…
…today's demanding applications, promises to keep
this powerful UV technology relevant for some time to come.
RAINER PÄTZEL and RALPH DELMDAHL (email@example.com) are with
Coherent, Santa Clara, CA; www.coherent.com.
FIGURE 3. The main steps in the excimer Laser Lift-Off…
R. Delmdahl, R. Pätzel, J. Brune, R. Senczuk, C. Goßler, R. Moser, M. Kunzer, U.T. Schwarz, Line beam
processing for laser lift-off of GaN from sapphire,
Phys Status Solidi (A) 209 (2012) pp.2653-2658
Dr. Ralph Delmdahl
…McLean W L and Croft M 1987 Appl. Phys.
Lett. 51 619-21
 Delmdahl R 2010 Nature Photon. 4 286
 Krueger R R, Rabinowitz Y S and Binder P S 2010 J. Refract.
Surg. 26 749-60
 Uhrmann T and Delmdahl R 2013 Solid State Technol.
 Paetzel R, Turk B,…
while also delivering the unit-to-unit consistency critical to their successful use in
sensing and other applications.
Ralph Delmdahl is product marketing manager at Coherent, Santa Clara CA; e-mail:
firstname.lastname@example.org; www.coherent.com. Kristian Buchwald is vice…
…packaging of microelectronics
by enabling structuring processes that are
greener while delivering superior results.
DR. RALPH DELMDAHL (ralph.delmdahl@coherent.
com) is a product marketing manager at Coherent Laser
Systems GmbH, Göttingen, Germany, www.coherent.
…and tablets. We look at an enabling technology to mass manufacture industrial-grade LTPS backplanes on large substrate panels. by Dr. Ralph Delmdahl Coherent In the digital age, our informationand knowledge society relies heavily on mobile display devices, which have become nothing less than…
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