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Density

UVblade Excimer Laser

UVblade Excimer Laser

…(nm) 308 308 308 308 308 Laser Pulse Energy (mJ) 580 580 1000 1000/2000 (high power model) 2000 Repetition Rate (Hz) 200 200 600 600 600 Energy Density (mJ/cm 2) 370 340 330 340/320 (high power model) 315 Beam Length (mm) 250 380 465 750 950 Beam Width (µm) 400 300 400 250/500 (high power model)…

VarioLas UV material processing

VarioLas UV material processing

…30 5 - Working Distance (mm) 50 50 150 Max. Repetition Rate (Hz) 100 100 100 Max. Energy Density (mJ/cm 2) at 193 nm 1000 1000 230 Max. Energy Density (mJ/cm 2) at 248 nm 3500 3500 600 Max. Energy Density (mJ/cm 2) at 308 nm 3000 3000 500 Energy Stability (%, 1 sigma) at 193 nm 2 2 2 Energy…