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E 400

Microelectronics

Microelectronics

…industrial-grade excimer laser which can deliver 1050 mJ at 308 nm, at a repetition rate of 300 Hz. The high pulse energy is used to pattern circuits up to 400 mm2 in area with a single laser pulse. And at 300 pulses per second, this “single pulse” laser process can generate 18,000 circuits/minute.…