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Ela Optics

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

…with an accuracy of 2 ns. The
result is the multi-beam multikilowatt excimer laser ,,Vyper".
Each laser beam of the Vyper
enters the optical delivery module
,,LineBeam" and all beams are
successively mixed, expanded
and spatially superimposed. In
the final stage, a…

VYPER Series Lasers

VYPER Series Lasers

…Adjustable Pulse Energy Advanced process control Motorized optics mounts (optional) Remote beam adjustment via hand-held control panel Solid-State Switch Maintenance-free operation Purged, External Resonator Design Highest beam stability and optics lifetime Corona Preionization Stable, homogeneous…

UV Processing Solutions

UV Processing Solutions

…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). UV Processing Solutions Literature 2019 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version Call…

LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

…Adjustable Pulse Energy Advanced process control Motorized optics mounts (optional) Remote beam adjustment via hand-held control panel Solid-State Switch Maintenance-free operation Purged, External Resonator Design Highest beam stability and optics lifetime Corona Preionization Stable, homogeneous…

Excimer Lasers

Excimer Lasers

…enabling technology for mass manufacturing of LTPS backplanes on large substrate panels with the highest yield. UV Optical Components UV Optical Components A wide range of UV Optical Components to make the most of your UV laser beam. UVblade UVblade UVblade excimer laser is used for Laser Lift-Off…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

Superior Reliability & Performance
8
Applications Matrix
Applications Matrix Excimer Lasers and UV Optical Systems
ExciStar IndyStar COMPex LEAP LAMBDA SX VYPER
Marking
Polymer, Teflon Marking · · ·
Visible and Invisible Marking (Eyeglass Marking, etc.) · · ·…

EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…volume, the single
biggest is Excimer Laser Annealing (ELA) for the
flat panel display market."
virtually all advanced smartphones.
The products we supply for ELA are
our VYPER excimer lasers and line
beam optics, comprising LineBeam
Systems which deliver the high…

CMM 11.5.indd

CMM 11.5.indd

…Vol 11 No. 5 27
article a
High performance microLED pixels necessitate high
mobility LTPS backplanes
While the excimer laser optical
system lends itself as a one-stop
technological solution to LLO wafer
release and wafer-to-panel mass
transfer processes, it is…

Laser Focus World - November 2017

Laser Focus World - November 2017

…Coherent (and, before that, Lambda Physik) has been the
pioneer for ELA. The success of this
application is based on considerable
advances in high-power excimer laser
technology and the UV optical system
that provides the line beam homogeneity required for uniform annealing…

an rep 2018 workfile 02

an rep 2018 workfile 02

…segments
deliver cost-effective, highly reliable photonics solutions, OLS is focused on high performance laser
sources and complex optical sub-systems, typically used in microelectronics manufacturing, medical
diagnostics and therapeutic medical applications, as well as in scientific…

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf

…High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be…

Coherent

Coherent

…could only be produced on expensive special glass at high temperatures. However, excimer-based
processes, such as excimer laser annealing (``ELA'') have allowed high-volume production of
low-temperature polysilicon (``LTPS'') on conventional glass substrates. Our excimer lasers provide…

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Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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