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Energy Density Control Of Excimer Laser

Excimer laser technology trends

Excimer laser technology trends

…population inversion in excimer lasers are high due
to the short wavelength and the considerable linewidth of the
relevant transitions. The typical concentration of the excited
activespeciesis1015 cm-3. Thesecanonlybeobtainedbyvery
high pump energy densities of about 10-2 J cm-3…

GeoLasHD excimer ablation laser system | Coherent

GeoLasHD excimer ablation laser system | Coherent

…generation laser ablation system for all-encompassing LA-ICP-MS elemental and isotopic analysis. Powered by the mighty COMPex laser, it uniquely combines sturdy high-resolution optical design, expert polarizer microscope, and the latest HD camera technology. The new and intuitive EAGLE control

LaserCam HR UV

LaserCam HR UV

…in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau Uniformity • Flatness Factor • Edge Steepness • Beam Uniformity • Effective Irradiation Area • Effective Average Power/Energy Density Adjustable Trigger…

LaserCam-HR II

LaserCam-HR II

…in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau Uniformity • Flatness Factor • Edge Steepness • Beam Uniformity • Effective Irradiation Area • Effective Average Power/Energy Density Adjustable Trigger…

LaserCam HR-InGaAs

LaserCam HR-InGaAs

…in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau Uniformity • Flatness Factor • Edge Steepness • Beam Uniformity • Effective Irradiation Area • Effective Average Power/Energy Density Adjustable Trigger…

Microelectronics

Microelectronics

excimer lasers delivers tangible benefits in all three areas. This direct patterning process takes advantage of the extremely high pulse energy of the LAMBDA SX laser. This is an industrial-grade excimer laser which can deliver 1050 mJ at 308 nm, at a repetition rate of 300 Hz. The high pulse energy

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015


of the particular materials in use. The high
pulse energy (over 1J) and repetition rate
(300Hz) provide rapid throughput of feature sizes down to 3µm. In addition, excimer laser ablation
provides excellent control of
feature depth and
"wall angle." The
latter is…

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…uniformity of excimer and
Nd:YAG lasers in the near field.The six new calculations are:
·Plateau Uniformity
·Flatness Factor
·Edge Steepness
·Beam Uniformity
·Effective Irradiation Area
·Effective Average Power/Energy Density
POWER
& ENERGY

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…pulsed circuit To provide the high pump energy densities in a short time interval as required for population inversion, 193 nm excimer lasers are discharge pumped using a high-voltage capacitor circuit (pulser) that discharges the stored electrical energy directly into the active ArF medium. The…

ILS Annealing.PDF

…of laser energy density is required to achieve
the desired melt characteristics for LTPS, this means that laser
power must also increase, assuming that the laser line length
is scaled up with the panel dimensions.
The Coherent VYPER lasers used for LTPS are powerful
excimer

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…ofdisplaysusingconventionaldisplayglass
was the 308-nm excimer laser for selective low-temperature polysilicon recrystallization. The excimer laser process to
Adapting Laser Lift-Off Technique for Flexible Displays
Excimer lasers optimized for high-energy
pulses have applications…

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