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Energy Stability

LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

…Resonator Design Highest beam stability and optics lifetime Corona Preionization Stable, homogeneous output Metal Ceramic Tube Extended tube lifetime Energy Monitor Preset, stabilized energy output Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W) LAMBDA SX…

LEAP

LEAP

Stabilized Laser Energy of up to 1 Joule in UV for fast and large are processing Individual laser pulse pattern by an internal burst generator Optimized resonator and tube design for high uptimes and fewer maintenance intervals Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy

COMPex excimer laser

COMPex excimer laser

…& Benefits COMPex Features & Benefits UV-energy stability better than 0.75% (1 Sigma) Ultimate Pulse Control (UPC) allows precise processing at the single pulse level Instant Energy Switching (IES) for online adaption of the energy during processing Data recording and extracting of all…