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Energy Stability

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

…308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz) 125 200 125 200 100 150 100 150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2…

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf

…248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz) 125 200 125 200 100 150 100 150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2…

COHR LEAPseries DS 0819 5.pdf

COHR LEAPseries DS 0819 5.pdf

…248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz) 125 200 125 200 100 150 100 150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2…

COHR LEAPseries DS 1119 1.pdf

COHR LEAPseries DS 1119 1.pdf

…248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz) 125 200 125 200 100 150 100 150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2…

COHR ExciStar DS 0120 1.pdf

COHR ExciStar DS 0120 1.pdf


Stabilized Power (W) 1 2 2.5 5 5 10
Beam Dimension (FWHM, mm, V x H) (5.8 ±0.5) x
(2.6 ±0.5)
(5.6 ±0.5) x
(2.6 ±0.5)
(5.8 ±0.5) x
(2.6 ±0.5)
(5.6 ±0.5) x
(2.6 ±0.5)
(5.8 ±0.5) x
(2.6 ±0.5)
(5.6 ±0.5) x
(2.6 ±0.5)
Energy Stability

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…(nm) 193 248 193 248 193 248
Max. Repetition Rate (Hz) 200 200 500 500 1000 1000
Stabilized Pulse Energy (mJ) 5 10 5 10 5 10
Stabilized Pulse Power (W) 1 2 2.5 5 5 10
Energy Stability (sigma, %) <2
Beam Dimension (FWHM, mm, V x H) (6 ±0.5) x (2.5 ±0.5)
Pulse Duration…

COHR ExciStar DS 0318 6.pdf

COHR ExciStar DS 0318 6.pdf

…(nm) 193 248 193 248 193 248
Max. Repetition Rate (Hz) 200 200 500 500 1000 1000
Stabilized Pulse Energy (mJ) 5 10 5 10 5 10
Stabilized Pulse Power (W) 1 2 2.5 5 5 10
Energy Stability (sigma, %) <2
Beam Dimension (FWHM, mm, V x H) (6 ±0.5) x (2.5 ±0.5)
Pulse Duration…

COHR ExciStar DS 1018 7.pdf

COHR ExciStar DS 1018 7.pdf

…(nm) 193 248 193 248 193 248
Max. Repetition Rate (Hz) 200 200 500 500 1000 1000
Stabilized Pulse Energy (mJ) 5 10 5 10 5 10
Stabilized Pulse Power (W) 1 2 2.5 5 5 10
Energy Stability (sigma, %) <2
Beam Dimension (FWHM, mm, V x H) (6 ±0.5) x (2.5 ±0.5)
Pulse Duration…

COHR VarioLas DS 0418 7.pdf

COHR VarioLas DS 0418 7.pdf

…50 150
Max. Repetition Rate (Hz) 100 100 100
Max. Energy Density (mJ/cm2)
at 193 nm
at 248 nm
at 308 nm
1000
3500
3000
1000
3500
3000
230
600
500
Energy Stability (%, 1 sigma)
at 193 nm
at 248 nm
at 308 nm

COHR VarioLas DS 1219 2.pdf

COHR VarioLas DS 1219 2.pdf

…50 50 150
Max. Repetition Rate (Hz) 100 100 100
Max. Energy Density (J/cm2)
at 193 nm
at 248 nm
at 308 nm
2.5
7.5
6.0
2.5
7.5
6.0
0.5
1.3
1.0
Energy Stability (%, 1 sigma)
at 193 nm
at 248 nm
at 308 nm
2…

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf

…248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz) 125 200 125 200 100 150 100 150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2…

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…LAMBDA SX E500 LAMBDA SX C600
Wavelength (nm) 308 308
Maximum Stabilized Pulse Energy (mJ) 1000 1000
Maximum Stabilized Average Power (W) 500 600
Maximum Repetition Rate (Hz) 500 600
Energy Stability (sigma, %) 0 .45 1
Pulse Duration (FWHM) (ns) 24 ±4 24 ±4
Beam…