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Excimer

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…Close All Excimer Lasers and Applications Products UV Processing Solutions LineBeam COMPex ExciStar XS IndyStar LAMBDA SX LEAP LPXpro GeoLasHD UV Optical Components UVblade VarioLas Family VYPER Excimer Lasers and Applications Literature Excimer Catalog Application Report: Excimer Laser Cleaning…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

VYPER

VYPER

VYPER Multiple beam, excimer lasers that feature kilo-watts of UV power and pulse energies of 2 or 4 Joules at 600 Hz repetition rate. Contact Us About This Product Close PRICE HERE The VYPER Series The VYPER is a multiple beam, very high power excimer laser providing the highest energy stability at…

LAMBDA SX

LAMBDA SX

LAMBDA SX High power industrial excimer laser providing highly stabilized UV power. Contact Us About This Product Close PRICE HERE The LAMBDA SX Series The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor.It is designed to deliver the best energy…

LPXpro

LPXpro

LPXpro Medium-Power multi-purpose excimer laser providing a broad range of UV power. LPXpro is a family of RoHS compliant excimer lasers offered at wavelengths of 193 nm, 248 nm, 308 nm and 351 nm, with output powers as high as 90W at 248 nm. The beam quality, high pulse energy, short pulse length…

COMPex

COMPex

COMPex The Excimer Laser – Market Leading UV-Technology Contact Us About This Product Close PRICE HERE The Excimer Laser – Market Leading UV-Technology COMPex lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in…

Excimer Laser EnergyMax Sensors

Excimer Laser EnergyMax Sensors

…cable with bend and strain relief protects against rough handling Coherent Excimer Laser EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. Excimer Laser EnergyMax Series sensors feature high accuracy and large active area (up…

Excimer laser technology trends

Excimer laser technology trends

…commercial excimer laser Figure 6. Output power evolution of 308 nm excimer laser systems. manufacturing via PLD demands exactly the opposite from the excimer laser. The following section will look into the PLD excimer laser requirements for large-scale production. 3. Excimer lasers in industrial…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

Application Report: EXCIMER LASER CLEANING FOR SENSITIVE SURFACES Ongoing advances in excimer laser technology have borne a new generation of high repetition rate ultraviolet (UV) lasers that offer superior performance and lend themselves to a host of cleaning operations. Excimer lasers offer…

Excimer laser technology trends

Excimer laser technology trends

…300 W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…in microelectronics applications are continuously being downscaled. Excimer lasers provide the 308 nm wavelength and short pulse duration required for highly localized energy coupling. The high output power of excimer lasers enables a large processing footprint and the high-throughput rates…

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