--> COMPex The Excimer Laser – Market Leading UV-Technology COMPex lasers are highly efficient light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD),…
EXCIMER LASERS & UV OPTICAL SYSTEMS 2019 Product Catalog
…Beam Optical System 308 nm excimer laser annealing enables market growth of faster, brighter, thinner and more lightweight AM-LCD and AM-OLED flat panel devices relying on high electron mobility. Datasheet LineBeam Applications Application Process Material Excimer Laser Annealing Surface…
--> LAMBDA SX High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability. LAMBDA SX lasers are…
2 R. Delmdahl et al.
Figure 1. Fabrication scheme of flexible displays by means of excimer LLO.
Figure 2. Schematics of the LLO characteristics using short and
about 100 nm, with the typical polymer layer thicknesses
extending from some ten to some hundred…
…modules, and components are manufactured for use with excimer lasers with easy integration into new and existing micromachining workstations and production lines. Excimer Lasers & UV Optical Systems Catalog Click to explore the current Excimer Lasers & UV Optical Systems catalog. (PDF…
…seconds for each eye.
All these advances are part of the
complete maturation of ArF excimer
technology. Historically, ArF has always been the most challenging of the
commonly used excimer output wavelengths, because of the combination of
deep UV photons and fluorine gas -…
…Microelectronics Flat panel display CO2
Advanced packaging and CO2
Semiconductor front-end CO2
Materials processing Metal cutting,…
…modern excimer lasers has become a
key technology for high yield thin layer
release in the manufacturing of the next
panel load panel unload
Fig. 4 Minimization of total laser pulse number via excimer laser…
--> IndyStar Fast Pulse, High Precision Processing IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193 nm and…
and crystallizes right behind the laser line the
polycrystalline silicon layer. This recrystallization
process is known as excimer laser annealing.
The throughput of a Vyper/LineBeam-system is
about 15,000 square meters of polysilicon per
month - equivalent to…
--> VarioLas VarioLas processing systems based on the powerful COMPex excimer laser are flexible tools for high-quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each VarioLas model available at 193 nm, 248 nm,…