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Excimer 308nm

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

AMOLED

TFT

CVD
a-Si

poly-Si

TFT

ELA

308nm

Gen 61.5m×1.8m

ELA

20

Lambda Physik
ELA

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Photonik Feb2014.pdf

Photonik Feb2014.pdf


The formation of a truly flexible display
occurs only within the last process step.
Here, the line beam of an excimer laser
having a wavelength of 308nm is focused
through the carrier glass onto the polymer
film and evaporates a thin fraction of the
polymer layer…

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf


Vyper/LineBeam technology, which
enables the required large-format
excimer laser annealing process of
transforming amorphous silicon panels into high-grade LTPS panels.
Technically, a 308nm excimer laser
line beam is scanned over the substrate with the amorphous silicon…

ILS Annealing.PDF

…(FIGURE 1).
In this technique, a pulsed excimer laser line beam is
scanned over the a-Si film. Silicon efficiently absorbs the
308nm excimer output. This high absorption, combined with
the high pulse energy of the excimer laser, makes it possible
to achieve near-complete…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…ofdisplaysusingconventionaldisplayglass
was the 308-nm excimer laser for selective low-temperature polysilicon recrystallization. The excimer laser process to
Adapting Laser Lift-Off Technique for Flexible Displays
Excimer lasers optimized for high-energy
pulses have applications…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…semiconductor
industry. The 308-nm wavelength is used for annealing silicon in high-performance displays. The same wavelength is also key to generating a unique long-wear
surface on the cylinder liners of high-performance diesel engines. And finally, excimers have a unique ability to…