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Excimer Gas

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


ExciStar
IndyStar
COMPex
Premix Gas Operation
Single Gas Operation
Premix
Helium
Halogen
Neon
Rare Gas
Helium
Where to Buy Excimer Gases
and Gas Installation Equipment
The gas concentrations, mixtures, and puities are specified…

34706a cover.indd

34706a cover.indd

…and instrumentation and materials processing
applications in Kaiserslautern, Germany. Our excimer gas laser products are manufactured in

ottingen, Germany. We refurbish excimer tubes at our manufacturing site in South Korea. We
manufacture the fiber-based lasers and a…

Excimer laser technology trends

Excimer laser technology trends

…as the gas is constantly refreshed with
about 50 on-the-fly micro-injections of halogen gas during
every gas life run.
On-the-fly halogen gas injections are unnoticeable in the
optical performance of the excimer laser and have become
a standard feature in the gas fill…

COMPex excimer laser

COMPex excimer laser

…The COMPex laser provides multi-hundred millijoules output, plus unmatched pulse-to-pulse stability. It also comes with an improved gas processor that extends both gas and optics lifetimes. Contact Us About This Product Close PRICE HERE Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse…

UV Optical Components

UV Optical Components

…Manual knob and digital scale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve. Datasheet Attenuator Module Features & Benefits Specifications Wavelength (nm) Attenuator Module, Manual…

IndyStar Excimer Laser

IndyStar Excimer Laser

IndyStar Fast Pulse, High Precision Processing IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at ultra-short 193 nm and 248…

Refractive Surgery with Excimers EU OuP.pdf

Refractive Surgery with Excimers EU OuP.pdf

…are part of the
complete maturation of ArF excimer
technology. Historically, ArF has always been the most challenging of the
commonly used excimer output wavelengths, because of the combination of
deep UV photons and fluorine gas -

albeit pre-mixed in trace amounts.
In…

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf


Excimer Laser Gases
Excimer Lasers and UV Optical Systems Excimer Laser Gases
COMPex
LEAP
LAMBDA SX
VYPER
ExciStar
IndyStar
COMPex
Premix Gas Operation
Single Gas Operation
Premix
Helium
Halogen
Neon
Rare Gas
Helium…

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd

…and instrumentation and materials
processing applications in Kaiserslautern, Germany. Our excimer gas laser products are manufactured
in G¨
ottingen, Germany. We refurbish excimer tubes at our manufacturing site in South Korea. We
manufacture the fiber-based lasers and a…

an rep 2018 workfile 02

an rep 2018 workfile 02


and instrumentation and materials processing applications in Kaiserslautern, Germany. Our excimer gas
laser products are manufactured in G¨
ottingen, Germany. We refurbish excimer tubes at our
manufacturing sites in Yong-In and An-Seong, South Korea.
We manufacture…

Coherent

Coherent

…our DPSS lasers used
in microelectronics and scientific applications in Hannover, Germany. Our excimer gas laser products
are manufactured in G¨
ottingen, Germany. We refurbish excimer tubes at our manufacturing site in
South Korea. We manufacture the fiber-based lasers and a…

HighLight-Direct-Diode-Industrial-Systems-Brochure.pdf

HighLight-Direct-Diode-Industrial-Systems-Brochure.pdf

…innovation and an uncompromising position on quality, Coherent is the most
forward-thinking and diversified manufacturer of solid-state, gas, excimer and semiconductor lasers
in the industry.
For more information, visit us on the Web at www.Coherent.com. Or call 800-527-3786.