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Excimer Lamp

Excimer laser technology trends

Excimer laser technology trends

…matter of fact, a modern excimer laser in a PLD laboratory
offers lower running costs at superior performance compared
with a crystal and flash-lamp-consuming, frequency-converted
Nd : YAG system [7].
2.2. Energy control and stabilization
Excimer lasers for PLD must meet…

Laser Focus World - November 2017

Laser Focus World - November 2017

…were mercury lamps, but the need
to produce smaller features drove manufacturers to shorter-wavelength sources
(again, because of diffraction)--specifically, excimer lasers.
Both 248 and 193 nm lasers are used
for photolithography. In particular, 193
nm excimer lasers enable…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…and electrical. For optical pumping, the energy source may be a lamp or, more commonly, another laser. Electrical pumping can be via a DC current (as in laser diodes), an electrical discharge (noble gas lasers and excimer lasers) or a radio-frequency discharge (some CO2 lasers). In a conventional…