Goettingen. The amorphous starting material melts
and crystallizes right behind the laser line the
polycrystalline silicon layer. This recrystallization
process is known as excimer laser annealing.
The throughput of a Vyper/LineBeam-system is
about 15,000 square meters…
Cover Story www.laserfocusworld.com.cn Laser Focus World China 14 Mar/ Apr 2018 Lambda Physik 40 UV AMLCD /Ludolf HerbstCoherent Laser Systems GmbH 1ELA a-Si poly-Si 2 LineBeam 1000/TwinVYPER LCD AMOLED
…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…
EXCIMER LASERS & UV OPTICAL SYSTEMS 2019 Product Catalog
…excimer laser series provides unique UV power to the production floor. It is used for applications ranging from microstructuring, advanced semiconductor packaging, Pulsed Laser Deposition Laser Lift-Off (LLO) to high power UV LIDAR. LEAP Excimer Laser LEAP Excimer Laser LEAP excimer lasers deliver a…
…An excimer laser operating
in the ultraviolet with a pulse width in the
nanosecond range was utilised. This laser was
chosen because its very high pulse energy
enables parallel production of thousands of
holes per second with a low operating cost.
Plus, the excimer's…
--> COMPex The Excimer Laser – Market Leading UV-Technology COMPex lasers are highly efficient light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD),…
…processed using a 193 nm excimer laser.
Figure 3. Bandgap of GaN, AlN and sapphire. The photon energy of the excimer laser is referenced in blue.
Using short laser pulses minimizes heat diffusion and reduces the stress on the device layer.
The typical excimer laser pulse length of…
Excimer lasers are pulsed (ns) gas lasers that emit, UV wavelengths
such as 193 nm, 248 nm and 308 nm, depending on which specific
gas mixture is operated in the laser. Coherent's few-Watt ExciStar
laser is used in glass marking…
…SX High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability. LAMBDA SX lasers are perfectly…
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family is an ideal source for
thin wafer laser debonding. It provides up to 20W…
…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
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