Very High-Power Excimer Lasers
The VYPER Series lasers are multiple beam very high-power excimer
lasers specially designed for Excimer Laser Annealing (ELA). The high
quality demand in high resolution mobile display manufacturing
…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor . Nowadays, all excimer lasers at…
www.coherent.com | email@example.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…
temperature would damage standard glass substrates, and
therefore necessitates the use of expensive, heat-resistant
EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME
RAINER PÄTZEL AND RALPH DELMDAHL
Silicon annealing enables
…quarter fiscal 2014 orders were lower primarily due to timing of large excimer laser annealing orders.
In the second quarter of fiscal 2014, we received a large order from one customer for excimer laser
annealing systems for low-temperature polycrystalline silicon (LTPS) processing, some…
…examples include excimer lasers used for polysilicon annealing of display backplanes, and for laser lift-off to separate flexible display films from glass substrates. Other important applications are the use of ultra-short pulse (USP) lasers for circuit repair, both CO2 and USP lasers for film and…
…in producing excimer lasers for industrial and scientific
applications. Here we interview company General Manager Richard Waldermann on the current state of excimer lasers and their future prospects.
Keywords: Excimer Laser, ELA - Excimer Laser Annealing, LLO - Laser Lift-Off, LASIK…
…Vyper/LineBeam technology, which
enables the required large-format
excimer laser annealing process of
transforming amorphous silicon panels into high-grade LTPS panels.
Technically, a 308nm excimer laser
line beam is scanned over the substrate with the amorphous silicon…
…optics causes many potential applications to rely instead on 355-nm lasers optimized
for short pulse duration, which can produce similar results in many materials.
Excimers represent another important pulsed laser technology. They can produce several discrete wavelengths throughout…
…to enable stable performance of AMLCD and AMOLED displays. Coherent is the market leader for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the…
…offered at 193 nm, 248 nm, and 308 nm. VYPER VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Excimer Lasers and Applications Literature Excimer Catalog Related Materials Videos UVblade - Solutions for Flexible…
…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…
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