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Excimer Laser Annealing

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

LAMBDA SX Excimer Laser Series | Coherent

LAMBDA SX Excimer Laser Series | Coherent

…SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).…

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf

…groundbreaking Vyper/LineBeam technology, which enables the required large-format excimer laser annealing process of transforming amorphous silicon panels into high-grade LTPS panels. Technically, a 308nm excimer laser line beam is scanned over the substrate with the amorphous silicon layer on top,…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…(110.2x33.3x82in.) LAMBDA SX for Excimer Laser Annealing Excimer Lasers Key Features Customer Benefits · Best Pulse Stability · High annealing homogeneity · Stable Beam Parameter · High annealing yield 1 Allspecificationsaresubjecttochangewithoutpriornoticeinordertoprovidethebestproductpossible.…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

…become the mainstream and is standardly based on excimer laser annealing (ELA). Current 308 nm excimer laser annealing systems have been upscaled to support glass substrates up to Gen 8 panel size. Excimer Laser Annealing Excimer Laser Annealing (ELA) is a key process step for converting the…

VYPER Series Lasers | Coherent

VYPER Series Lasers | Coherent

…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

Microelectronics

Microelectronics

…to enable stable performance of AMLCD and AMOLED displays. Coherent is the market leader for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

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