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Excimer Laser Crystallization

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…cost-effective. Excimer lasers deliver the necessary pulse energy to be highly selective, and to process large areas at industrial speed and with superior quality and yield. Related Products LAMBDA SX UVblade VarioLas LEAP Excimer Laser Annealing The challenge for Liquid crystal display (LCD)…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

Superior Reliability & Performance
36
LineBeam Excimer Lasers and UV Optical Systems
MECHANICAL SPECIFICATIONS
LineBeam 1000
Optical System
Top View
Coherent, Inc.,
5100 Patrick Henry Drive Santa Clara, CA 95054
p. (800) 527-3786 | (408) 764-4983

Microelectronics

Microelectronics

…The Coherent Paladin family of lasers is the ideal source for LDI. Related Products Paladin Advanced 355 Paladin Advanced 532 Paladin Compact 355 Laser Crystallization for LTPS Laser crystallization drives faster, brighter displays with HD resolution. Excimer laser powers in excess of 1 kW and high…

Excimer laser technology trends

Excimer laser technology trends

…of fact, a modern excimer laser in a PLD laboratory
offers lower running costs at superior performance compared
with a crystal and flash-lamp-consuming, frequency-converted
Nd : YAG system [7].
2.2. Energy control and stabilization
Excimer lasers for PLD must meet high…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…

Laser Focus World - November 2017

Laser Focus World - November 2017

lasers.
Both 248 and 193 nm lasers are used
for photolithography. In particular, 193
nm excimer lasers enable circuit pattern
features down to 10 nm, which is far below the diffraction limit. Achieving this
necessitated the development of highly
specialized excimers

EU LASER Interview R Waldermann Goettingen German.pdf

EU LASER Interview R Waldermann Goettingen German.pdf

…Anteil durch
die ELA (Excimer Laser Annealing) Anwendung
für den Display-Markt geprägt."
krotechnik, Displays, Biotechnologie
und Energietechnik. Wenn man das
Verkaufsvolumen betrachtet, ist der
größte Anteil durch die ELA (Excimer
Laser Annealing) Anwendung für…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…modifies the crystal refractive index and alters the polarization of the incoming light; an appropriate combination of
polarization-sensitive optics can be placed in the cavity to prevent light of altered polarization from circulating.
Other types of lasers, such as excimer lasers, do not…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…IGBT, 3-D integration and more. Excimer
lasers are widely adopted for the crystallization of amor
phous silicon
films used to form the polysilicon layers that provide the electrical
functionality for high resolution displays. Laser crystallized polysilicon
also provides the…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…shown here with two dual-oscillator VYPER lasers, with all four beams merging into a 1300-mm length processing beam. Excimer lasers enable high-volume manufacturing of flexible displays; a key step is laser lift-off where high-duty cycle excimer lasers are used to release the flexible displays from…

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd


additive manufacturing Semiconductor
Laser Machine Tools Ultrafast
Laser marking and coding CO2
DPSS
Ultrafast
Non-metal cutting, drilling CO, CO2
DPSS
Ultrafast
Excimer
Semiconductor
Laser Machine Tools
OEM components and instrumentation…