…UV lasers, Coherent understands that getting the best results requires an
excimer laser that matches your application. That's why we offer the widest selection of excimer laser power
and energy options.
Scalable Power. Ultimate Precision.
Quick Selection Chart Excimer Lasers and…
…Power / Watt
Laser Power Roadmap
commercial excimer laser
Figure 6. Output power evolution of 308 nm excimer laser systems.
manufacturing via PLD demands exactly the opposite from the
excimer laser. The following section will look into the PLD
Wavelength (nm) 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2 <2
Max. Repetition Rate (Hz) 1000 2000 1000 2000
…systems for LLO processing consist of the UV excimer laser source, which nowadays
extends to output power levels beyond kilowatts , and a
line beam optical system design, as shown in Figure 4. The
optical train transforms the laser beam into an extremely
Figure 3. Long-axis…
indentation depths of about 100 nm.
Fig 4: Concept of a continuous DLC coating system based on
four high power excimer lasers.
While the excimer laser deposition and annealing method clearly produces high hardness films with excellent
physical characteristics, successful…
power and 1 Joule pulse energy.
A patented high voltage switching
device ensures temporally
synchronized light pulse
emission of the two oscillators
with an accuracy of 2 ns. The
result is the multi-beam multikilowatt excimer laser ,,Vyper".
Each laser beam of…
…inside the laser tube,
what is the life expectancy of the tube,
how stable is the output power, what
are beam hotspots, how much unscheduled downtime might I expect? Today,
system builders report that they hardly
ever hear this type of question. The ArF
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family is an ideal source for
thin wafer laser debonding. It provides up to 20W…
advances in high-power excimer laser
technology and the UV optical system
that provides the line beam homogeneity required for uniform annealing of
ever-larger panels (see Fig. 4).
The processing capabilities of excimer lasers, together with ongoing improvements…
…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
…achieved with moderate laser powers.
In summary, excimer lasers have excellent potential for emerging laser applications in the LED
space. Their unique characteristics such as short UV wavelength, and short pulse length,
combined with high energy and power, are well suited for the…
…370 mm line beam
combined with our 300W UV laser;
today, it is 1,600 mm driven by 3.6 kW
LASER: There are other solutions of
Excimer Lasers ...
Waldermann: An important developing application for us is Laser Lift-Off
(LLO), which is utilized in the…