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Excimer Laser Pulse Shape

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the pulsing excimer laser line beam field in one or two scans,
it is possible to cover an entire Gen 4.5 substrate panel
Figure 5. Sketch of the optical line beam delivery system.
Table 2. Processing metrics for the Gen 4.5
substrate LLO in one scan and two scans.
Laser

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
Conclusion
Excimer lasers

LaserCam HR-InGaAs

LaserCam HR-InGaAs

…calculations will allow for greater flexibility for the analysis of applications involving flat top beam shapes. These BeamView-USB calculations may assist in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau…

LaserCam-HR II

LaserCam-HR II

…calculations will allow for greater flexibility for the analysis of applications involving flat top beam shapes. These BeamView-USB calculations may assist in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau…

Microelectronics

Microelectronics

pulse energy of the LAMBDA SX laser. This is an industrial-grade excimer laser which can deliver 1050 mJ at 308 nm, at a repetition rate of 300 Hz. The high pulse energy is used to pattern circuits up to 400 mm2 in area with a single laser pulse. And at 300 pulses per second, this “single pulse”

Refractive Surgery with Excimers EU OuP.pdf

Refractive Surgery with Excimers EU OuP.pdf

…high laser
reliability levels, gas lifetimes, and laser
tube lifetimes across the entire excimer
product line.
The ExciStar family of excimer lasers
from Coherent continues to be the
dominant choice of refractive surgery
builders systems. These lasers made

Whitepaper Thin Wafer Laser Debonding.pdf

Whitepaper Thin Wafer Laser Debonding.pdf

…400 pulses 900 pulses
Pulse Rate 10Hz 20Hz
Throughput >60 wafers/hr >60 wafers/hr
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family…

EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…biggest is Excimer Laser Annealing (ELA) for the
flat panel display market."
virtually all advanced smartphones.
The products we supply for ELA are
our VYPER excimer lasers and line
beam optics, comprising LineBeam
Systems which deliver the high energy pulses in a long…

Laser Focus World - November 2017

Laser Focus World - November 2017

…the excimer laser
in a process called excimer laser annealing (ELA; see Fig. 3). Specifically, a pulsed
excimer laser line beam is scanned over
the a-Si film, which efficiently absorbs the
308 nm excimer output.
This high absorption, combined with
the high pulse energy…

Laser Focus World - August 2016

Laser Focus World - August 2016

…deliver these kinds of benefits.
The ideal laser for LTPS annealing produces high energy and UV pulses, and has
an output beam conducive for shaping
into a long, thin line. But this technology
congruence for our particular excimer lasers was just the starting point. In fact, it…

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…using a 193 nm excimer laser.
Figure 3. Bandgap of GaN, AlN and sapphire. The photon energy of the excimer laser is referenced in blue.
Using short laser pulses minimizes heat diffusion and reduces the stress on the device layer.
The typical excimer laser pulse length of 10-20…

Laser Focus World - February 2016

Laser Focus World - February 2016

…WritingauniformFBGwithacenter-wavelength transmission reduction of 20-50 dB
might require as many as 1000 of the 5
mJ pulses from the laser. As this laser operates at 500 Hz, this means an exposure
time of 2 s. Chirped FBGs (in which the
grating period changes along the length…