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Excimer Laser Pulse Shape

Whitepaper Thin Wafer Laser Debonding.pdf

Whitepaper Thin Wafer Laser Debonding.pdf

pulses 900 pulses Pulse Rate 10Hz 20Hz Throughput >60 wafers/hr >60 wafers/hr Table 1: Excimer laser parameters and throughput Such requirements can be fulfilled with compact and affordable low power excimer lasers. The Coherent COMPexPro excimer laser family is an ideal source for thin wafer laser

LaserCam HR-InGaAs

LaserCam HR-InGaAs

…calculations will allow for greater flexibility for the analysis of applications involving flat top beam shapes. These BeamView-USB calculations may assist in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau…

Whitepaper Thin Wafer Laser Debonding.pdf

Whitepaper Thin Wafer Laser Debonding.pdf

pulses 900 pulses Pulse Rate 10Hz 20Hz Throughput >60 wafers/hr >60 wafers/hr Table 1: Excimer laser parameters and throughput Such requirements can be fulfilled with compact and affordable low power excimer lasers. The Coherent COMPexPro excimer laser family is an ideal source for thin wafer laser

Laser Focus World - August 2016

Laser Focus World - August 2016

…that could deliver these kinds of benefits. The ideal laser for LTPS annealing produces high energy and UV pulses, and has an output beam conducive for shaping into a long, thin line. But this technology congruence for our particular excimer lasers was just the starting point. In fact, it took over…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…substrate under the pulsing excimer laser line beam field in one or two scans, it is possible to cover an entire Gen 4.5 substrate panel Figure 5. Sketch of the optical line beam delivery system. Table 2. Processing metrics for the Gen 4.5 substrate LLO in one scan and two scans. Laser parameters…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…substrate under the pulsing excimer laser line beam field in one or two scans, it is possible to cover an entire Gen 4.5 substrate panel Figure 5. Sketch of the optical line beam delivery system. Table 2. Processing metrics for the Gen 4.5 substrate LLO in one scan and two scans. Laser parameters…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…substrate under the pulsing excimer laser line beam field in one or two scans, it is possible to cover an entire Gen 4.5 substrate panel Figure 5. Sketch of the optical line beam delivery system. Table 2. Processing metrics for the Gen 4.5 substrate LLO in one scan and two scans. Laser parameters…

Refractive Surgery with Excimers EU OuP.pdf

Refractive Surgery with Excimers EU OuP.pdf

…enabled extremely high laser reliability levels, gas lifetimes, and laser tube lifetimes across the entire excimer product line. The ExciStar family of excimer lasers from Coherent continues to be the dominant choice of refractive surgery builders systems. These lasers made their name with a…

Microelectronics

Microelectronics

pulse energy of the LAMBDA SX laser. This is an industrial-grade excimer laser which can deliver 1050 mJ at 308 nm, at a repetition rate of 300 Hz. The high pulse energy is used to pattern circuits up to 400 mm2 in area with a single laser pulse. And at 300 pulses per second, this “single pulse”

LaserCam HR UV

LaserCam HR UV

…calculations will allow for greater flexibility for the analysis of applications involving flat top beam shapes. These BeamView-USB calculations may assist in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…using a high power excimer laser (e.g. 300W), the beam can be shaped to cover about 1-2cm2 . The previously described SÜSS MicroTec ELP300 with integrated high power excimer laser is capable of seed layer removal throughputs of 60 to 100 wafers per hour. Conclusion Excimer lasers have been a key…

LaserCam-HR II

LaserCam-HR II

…calculations will allow for greater flexibility for the analysis of applications involving flat top beam shapes. These BeamView-USB calculations may assist in the analysis of Excimer and Nd:YAG laser customers looking to analyze beam uniformity in the near field. The six new features are: • Plateau…

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