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Excimer Laser

Whitepaper Thin Wafer Laser Debonding.pdf

Whitepaper Thin Wafer Laser Debonding.pdf

…>60 wafers/hr
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family is an ideal source for
thin wafer laser debonding. It provides up to 20W…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
Conclusion
Excimer lasers

Excimer laser technology trends

Excimer laser technology trends

excimer laser
Figure 6. Output power evolution of 308 nm excimer laser systems.
manufacturing via PLD demands exactly the opposite from the
excimer laser. The following section will look into the PLD
excimer laser requirements for large-scale production.
3. Excimer lasers in…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…environmentally and cost-effective. Excimer lasers deliver the necessary pulse energy to be highly selective, and to process large areas at industrial speed and with superior quality and yield. Related Products LAMBDA SX UVblade VarioLas LEAP Excimer Laser Annealing The challenge for Liquid crystal…

The PCB Magazine, November 2015

The PCB Magazine, November 2015

…successfully produced.
In addition, mask-based excimer laser ablation provides excellent control of feature depth
and wall angle. Unlike CO
2
laser via drilling,
which usually takes just three laser pulses, excimer laser drilling utilizes numerous pulses,
each of which…

Microsoft Word - Document1

Microsoft Word - Document1

…manufacturing.
These utilize lower power CO2 and fiber lasers, and
increasingly, nanosecond pulsewidth diodepumped, solid-state lasers and industrial ultrafast
(picosecond pulsewidth regime) sources, as well as
excimer lasers. We now support applications
spanning precision…

Microelectronics

Microelectronics

…Solid-state lasers, CW and pulsed (visible and UV) Ion lasers CO2 lasers Semiconductor diode lasers (IR, visible, violet) Measurement Instruments Related Products HYPER RAPID HyperRapid NX Monaco Femtosecond Laser | Coherent Excimer Lasers & UV Beam Delivery Ion Lasers Sapphire Lasers

UVblade Excimer Laser

UVblade Excimer Laser

…model) ±100 UV blade Key Features Cost Effective Laser Optical Solutions for Laser Lift-Off (LLO) Pulse on Demand (POD) Highest Beam Utilization Homogeneous Energy Distribution Scalability in Line Lengths and Energy Density Systems for Laser Lift-Off Applications - UVblade gently detaches delicate…

GeoLasHD excimer ablation laser system

GeoLasHD excimer ablation laser system

--> GeoLasHD Laser Ablation of Solid Samples at 193 nm GeoLasHD is the next generation laser ablation system for all-encompassing LA-ICP-MS elemental and isotopic analysis. Powered by the powerful COMPex laser, it uniquely combines sturdy high-resolution optical design, expert polarizer microscope,…

LEAP Excimer Lasers

LEAP Excimer Lasers

--> LEAP Excimer Laser High Energy, High Precision Processing LEAP excimer lasers deliver a unique combination of high duty-cycle output, outstanding reliability, and low cost of ownership. This makes them an ideal source for a diverse assortment of demanding, high throughput, high-precision…

IndyStar Excimer Laser

IndyStar Excimer Laser

--> IndyStar Excimer Laser Fast Pulse, High Precision Processing IndyStar is a rugged high-duty cycle excimer laser designed for fast pulse frequency applications as high as 2000 Hz. Based on proven ALMETA tube technology, the Semi-S2 certified IndyStar operates over many billion pulses at…

Excimer Laser EnergyMax Sensors

Excimer Laser EnergyMax Sensors

…cable with bend and strain relief protects against rough handling Coherent Excimer Laser EnergyMax sensors are specifically optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. Excimer Laser EnergyMax Series sensors feature high accuracy and large active area (up to…