Cover Story www.laserfocusworld.com.cn Laser Focus World China 14 Mar/ Apr 2018 Lambda Physik 40 UV AMLCD /Ludolf HerbstCoherent Laser Systems GmbH 1ELA a-Si poly-Si 2 LineBeam 1000/TwinVYPER LCD AMOLED
removal. Next, the large rectangular beam produced by
excimer lasers can easily be shaped and homogenized to
match the geometry of typical CFRP surface preparation
applications. Finally, excimer lasers offer a unique combination of high per-pulse energy and repetition…
Goettingen. The amorphous starting material melts
and crystallizes right behind the laser line the
polycrystalline silicon layer. This recrystallization
process is known as excimer laser annealing.
The throughput of a Vyper/LineBeam-system is
about 15,000 square meters…
EXCIMER LASERS & UV OPTICAL SYSTEMS 2019 Product Catalog
…An excimer laser operating
in the ultraviolet with a pulse width in the
nanosecond range was utilised. This laser was
chosen because its very high pulse energy
enables parallel production of thousands of
holes per second with a low operating cost.
Plus, the excimer's…
Excimer lasers are pulsed (ns) gas lasers that emit, UV wavelengths
such as 193 nm, 248 nm and 308 nm, depending on which specific
gas mixture is operated in the laser. Coherent's few-Watt ExciStar
laser is used in glass marking…
…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…
…processed using a 193 nm excimer laser.
Figure 3. Bandgap of GaN, AlN and sapphire. The photon energy of the excimer laser is referenced in blue.
Using short laser pulses minimizes heat diffusion and reduces the stress on the device layer.
The typical excimer laser pulse length of…
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family is an ideal source for
thin wafer laser debonding. It provides up to 20W…
…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
Figure 6. Output power evolution of 308 nm excimer laser systems.
manufacturing via PLD demands exactly the opposite from the
excimer laser. The following section will look into the PLD
excimer laser requirements for large-scale production.
3. Excimer lasers in…
In addition, mask-based excimer laser ablation provides excellent control of feature depth
and wall angle. Unlike CO
laser via drilling,
which usually takes just three laser pulses, excimer laser drilling utilizes numerous pulses,
each of which…