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Excimer Laser

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Cover Story www.laserfocusworld.com.cn Laser Focus World China 14 Mar/ Apr 2018 Lambda Physik 40 UV AMLCD /Ludolf HerbstCoherent Laser Systems GmbH 1ELA a-Si poly-Si 2 LineBeam 1000/TwinVYPER LCD AMOLED

Industrial Photonics - January 2014

Industrial Photonics - January 2014

…material
removal. Next, the large rectangular beam produced by
excimer lasers can easily be shaped and homogenized to
match the geometry of typical CFRP surface preparation
applications. Finally, excimer lasers offer a unique combination of high per-pulse energy and repetition…

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf


Goettingen. The amorphous starting material melts
and crystallizes right behind the laser line the
polycrystalline silicon layer. This recrystallization
process is known as excimer laser annealing.
The throughput of a Vyper/LineBeam-system is
about 15,000 square meters…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

EXCIMER LASERS & UV OPTICAL SYSTEMS 2019 Product Catalog

CMM 8.2.indd

CMM 8.2.indd

…An excimer laser operating
in the ultraviolet with a pulse width in the
nanosecond range was utilised. This laser was
chosen because its very high pulse energy
enables parallel production of thousands of
holes per second with a low operating cost.
Plus, the excimer's

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…micromachining applications.
Excimer Lasers:
Excimer lasers are pulsed (ns) gas lasers that emit, UV wavelengths
such as 193 nm, 248 nm and 308 nm, depending on which specific
gas mixture is operated in the laser. Coherent's few-Watt ExciStar
laser is used in glass marking…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…processed using a 193 nm excimer laser.
Figure 3. Bandgap of GaN, AlN and sapphire. The photon energy of the excimer laser is referenced in blue.
Using short laser pulses minimizes heat diffusion and reduces the stress on the device layer.
The typical excimer laser pulse length of…

Whitepaper Thin Wafer Laser Debonding.pdf

Whitepaper Thin Wafer Laser Debonding.pdf

…>60 wafers/hr
Table 1: Excimer laser parameters and throughput
Such requirements can be fulfilled with compact and
affordable low power excimer lasers. The Coherent
COMPexPro excimer laser family is an ideal source for
thin wafer laser debonding. It provides up to 20W…

Industrial Laser Solutions - September/October 2015

Industrial Laser Solutions - September/October 2015

…power excimer laser (e.g. 300W), the beam
can be shaped to cover about 1-2cm2.
The previously described SÜSS MicroTec
ELP300 with integrated high power excimer laser is capable of seed layer removal
throughputs of 60 to 100 wafers per hour.
Conclusion
Excimer lasers

Excimer laser technology trends

Excimer laser technology trends

excimer laser
Figure 6. Output power evolution of 308 nm excimer laser systems.
manufacturing via PLD demands exactly the opposite from the
excimer laser. The following section will look into the PLD
excimer laser requirements for large-scale production.
3. Excimer lasers in…

The PCB Magazine, November 2015

The PCB Magazine, November 2015

…successfully produced.
In addition, mask-based excimer laser ablation provides excellent control of feature depth
and wall angle. Unlike CO
2
laser via drilling,
which usually takes just three laser pulses, excimer laser drilling utilizes numerous pulses,
each of which…