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1 - 12 of 59 Products for 'F2 Excimer' Page 1 of 5 |

F2 Excimer

COHR COMPexProSeries 0916.pdf

COHR COMPexProSeries 0916.pdf

…High Pulse Energy Excimer Lasers COMPexPro Series VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN60825-1 (1994) Model COMPexPro 102 COMPexPro 110 COMPexPro 201 COMPexPro 205 COMPexPro F2 Power (W) 20 50 20…

LTJ Excimer 0607.pdf

LTJ Excimer 0607.pdf

…product development trends. Excimers - Unique Benefits and Unique Challenges in an excimer laser, a plasma discharge tube is filled with a mixture of three different gases: a halogen (either F2 or HCl), a rare gas (such as kr or Xe) and a "bath" gas (Ne or He). The excimer plasma tube operates at a…

2013-Excimer-UV-Optical-Systems-Product-Catalog.pdf

2013-Excimer-UV-Optical-Systems-Product-Catalog.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 31 On-Site Requirements Excimer Lasers Single-phase AC 115V, 50/60 Hz or 230V, 50/60 Hz Power Air Cooling (air-to-air exchange) Single-phase AC 230V, 50/60 Hz Three-phase AC 200/208V, 50/60 Hz or 400V, 50/60 Hz Three-phase AC…

Highlights No. 56 nichtausg.QX3

Highlights No. 56 nichtausg.QX3

…resolution much below one micrometer, and lateral dimensions of few micrometers fused silica as well as PTFE can only be structured by F2 excimer laser radiation. As already shown, the manufacturing process developed at the Laser Zentrum Hannover e.V. (LZH) for three-dimensional micro-contours,…

COHR Excimer2012 Catalog 5.pdf

COHR Excimer2012 Catalog 5.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 37 On-Site Requirements Excimer Lasers Single-phase AC 115V, 50/60 Hz or 230V, 50/60 Hz Power Air Cooling (air-to-air exchange) Single-phase AC 230V, 50/60 Hz Three-phase AC 200/208V, 50/60 Hz or 400V, 50/60 Hz Three-phase AC…

COHR Excimer2015 Catalog 7.pdf

COHR Excimer2015 Catalog 7.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 31 On-Site Requirements Excimer Lasers Single-phase AC 230V, 50/60 Hz 208 V, 50/60 Hz 120 V, 50/60 Hz 104 V, 50/60 Hz Power Air Cooling (air-to-air exchange) Single-phase AC 230V, 50/60 Hz Three-phase AC 200/208V, 50/60 Hz or…

Highlights No. 56 nichtausg.QX3

Highlights No. 56 nichtausg.QX3

…in bimolecular reactions of Cl with propane [4] and n-pentane [5]. The Cornell group has pioneered the use of 157 nm radiation generated by the F2 excimer laser to photoionize products formed in metal-hydrocarbon bimolecular reactions. We adapted the latter technique to our crossed-beam velocity map…

No Job Name

No Job Name

…transfer) 130 9.5 10 <0.1 Ne/Ar/Kr Kr
* atomic emission line (after energy transfer) 124 10.0 10 <0.1 Ar/F2 Ne/F2 F2
*
radiative excimer decay 157 7.9 10 2 Ar/F2 ArF
* radiative excimer decay 193 6.4 10 2 a Percentage of the electron energy deposited in the rare gas that is converted into VUV…

702 TuiLaser Reprint.QXD

702 TuiLaser Reprint.QXD

C ompared with other excimers, F2 lasers emitting at 157 nm have few commercial applications. In fact, were it not for microlithography, it's possible that these excimers would remain laboratory curiosities for years to come. As it is, their largest market is still three years distant, when the…

Highlights No. 56 nichtausg.QX3

Highlights No. 56 nichtausg.QX3

…standard excimer or F2 lasers, the equivalent evaluation yields the spatial propagation characteristics or directional distribution of the beam. Measurements were performed in a vacuum chamber for an LPX® 140i laser (Lambda Physik) operated at 157 nm. Fig. 1 shows the spot distribution of the F2

20390-571

20390-571

…illuminated mask is imaged onto the sample located on precision stages. The whole system is surrounded by a housing and flushed with inert gas. Using an F2 laser offering up to 50 mJ of pulse energy, the laser fluence available on the target amounts to several Joules per centimeter squared, which is…

pdf 130.pdf

pdf 130.pdf

The experimental arrangement is shown in Fig. 1: The beam of a laboratory-constructed excimer laser, operated as a F2 laser, propagated via a gas-tight tube into the processing chamber, both evacuated to 10-5 Torr and subsequently flushed with several Torr of Ar gas to allow for VUV transparency. A…

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