…produce superior damage resistance characteristics. This enables operation with lasers that produce very high energy per pulse or very high peak fluences. The J-50MB-YAG sensor is rated to withstand the following energy densities: Wavelength Maximum Energy Density 266 nm 1 J/cm 2 355 nm 0.8 J/cm 2…
…(< 1% rms), nearly perfect process control is achieved by
providing a large process window. The beam on the wafer must provide the same fluence over
its whole cross section - a flat-top beam is required. Furthermore, the exact shape of the beam
hitting the wafer in the LLO process…
…Size (µm) 0.1 GeoLasHD Key Features Ultrashort 193 nm wavelength for ablation in every material Schwarzschild ablation objective enabling widest fluence range at superior crater bottom flatness HD camera and EAGLE software package for wide area sample inspection with micron resolution Multi-format…
…extends the range of possible target materials that can be used. Second, it enables a larger area on the target to be ablated with the desired fluence. In turn, this area enlargement increases the deposition rate and reduces the plume angle, resulting in higher deposition efficiency. Finally, higher…
…volume per pulse when the pulse fluence
is increased. The ablated volume per pulse is zero at the threshold fluence and increases with fluence but only
logarithmically. At a fixed output power, more volume can therefore be ablated if the energy fluence is
lowered, while simultaneously…
…pulse energy/peak pulse fluence (all other factors being fixed).
This typical curve has the peak ablation rate occurring at an optimum fluence that is usually equal
to 5 to 10 times the fluence required to begin ablating the material. Above the optimum fluence,
despite the higher…
…rate 1 Hz, 10 laser pulses, laser fluence 95 mJ/cm2, depth 4.5 nm per pulse, circle mask of 2
mm diameter, tilt angle 45° and at a magnification of 1.6k. (Right) the same parameters as above and at a 60k ×
At much higher fluences (e.g., 250 mJ/cm2), the ablated surface…
…1 µm thick ta-C film on a 400 µm thick silicon substrate, produced by
successive deposition and annealing at an ablation fluence of 12 J/cm2 and an annealing fluence of 150 mJ/cm2).
Adherence for 2 µm thick ta-C films was also quantified by conventional scratch testing. Since the adherence…
…Operating Wavelength (nm) 193
Spot Sizes (µm) 2 to 160
Optical Resolution (µm) 1
Beam Homogeneity (%) (1 sigma) 1
Maximum Fluence (J/cm2) 50
Pulse Stability (%, rms) 1
Repetition Rate (Hz) 1 to 10 (option: 1 to 100)
X,Y-Drive Min. Step Size (µm) 0.1
…and which deliver the performance overhead to
support expected miniaturization trends in all
these areas for the foreseeable future. PCB
Figure 4: Varying laser fluence enables manipulation of feature side-wall angles, which can be
important in subsequent deposition steps.
…surfaces to match with the right
excimer laser for our customers' production needs.
Determining the optimum parameter set--wavelength, fluence level, beam geometry, laser pulse
frequency--is pivotal to quality and throughput for UV applications.
Materials Are Not Alike. Neither…
…Superior pulse energy of up to 750 mJ to enable effective ablation at large field size · Unrivalled pulse stability of 0.75%, rms to ensure high fluence control · Ultimate pulse control and system parameter logging to deliver smart and reproducible thin films APPLICATIONS · PLD - Pulsed Laser…