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Halogen

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


LAMBDA SX
VYPER
ExciStar
IndyStar
COMPex
Premix Gas Operation
Single Gas Operation
Premix
Helium
Halogen
Neon
Rare Gas
Helium
Where to Buy Excimer Gases
and Gas Installation Equipment
The gas concentrations, mixtures,…

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf


LAMBDA SX
VYPER
ExciStar
IndyStar
COMPex
Premix Gas Operation
Single Gas Operation
Premix
Helium
Halogen
Neon
Rare Gas
Helium
Where to Buy Excimer Gases
and Gas Installation Equipment
The gas concentrations, mixtures,…

UCLD Catalog.book

UCLD Catalog.book

…modes and duty cycles; performance check; laser maintenance procedures like
new fill, optic cleaning/exchange, alignment, calibration, and halogen filter exchange.
Prerequisites: Complete product knowledge requires a extended understanding of electronic and optical
systems. Students…

Excimer laser technology trends

Excimer laser technology trends


deviation is observed, as the gas is constantly refreshed with
about 50 on-the-fly micro-injections of halogen gas during
every gas life run.
On-the-fly halogen gas injections are unnoticeable in the
optical performance of the excimer laser and have become
a standard…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®


alignment of the resonator mirrors.
Pulsed lasers
Some materials - like excited dimers (or "excimers") of a noble gas with a halogen, such as ArF and XeCl - sustain laser action for only a brief period of
several nanoseconds. Other lasers, like Nd or Yb diode-pumped solid-state…