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Homogenizer Lens Arrays

Microelectronics

Microelectronics

…by vapor deposition of a uniform layer of metal (e.g., Au, Ag, Cu, Al) onto a flexible substrate such as PET, polyimide, PEN, or PMMA. The homogenized excimer beam is passed through a photomask, which is then re-imaged on this coated substrate. The high energy UV photons interact with the…

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