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LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

--> LAMBDA SX High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability. LAMBDA SX lasers are…

Excimer Lasers

Excimer Lasers

…applications as high as 2000 Hz. It operates at ultra-short 193 nm and 248 nm wavelengths and is used for high precision processing. LAMBDA SX LAMBDA SX The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It is used for applications ranging from…

Laser Focus World - November 2017

Laser Focus World - November 2017

…years ago by Lambda Physik (now Coherent; Santa Clara, CA). Interestingly, its developers-- Bernd Steyer and Dirk Basting--were both chemists whose main goal was to develop a light source for photochemistry and dye laser pumping. As soon as excimer lasers entered the market, Lambda Physik began to…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


2
TABLE OF CONTENTS
Introduction 4-9
ExciStar 10-12
IndyStar 13-15
COMPex 16-19
LEAP 20-23
LAMBDA SX 24-26
VYPER/TwinVYPER/TriVYPER 27-30
Table of Contents Excimer Lasers and UV Optical Systems
ExciStar IndyStar COMPex LEAP LAMBDA SX VYPER

Microelectronics

Microelectronics

…lasers delivers tangible benefits in all three areas. This direct patterning process takes advantage of the extremely high pulse energy of the LAMBDA SX laser. This is an industrial-grade excimer laser which can deliver 1050 mJ at 308 nm, at a repetition rate of 300 Hz. The high pulse energy is…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…necessary pulse energy to be highly selective, and to process large areas at industrial speed and with superior quality and yield. Related Products LAMBDA SX UVblade VarioLas LEAP Excimer Laser Annealing The challenge for Liquid crystal display (LCD) manufacturers is to produce higher performance…

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

AMOLED

TFT

CVD
a-Si

poly-Si

TFT

ELA

308nm

Gen 61.5m×1.8m

ELA

20

Lambda Physik
ELA

----

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

LAMBDA SX High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor. It delivers high and stable pulse energy, and also features a number of innovative technologies for unsurpassed performance and reliability. LAMBDA SX lasers are…

COHR WP PropagationDispersionMeasurement of sub 10fsPulses 08 29 18.pdf

COHR WP PropagationDispersionMeasurement of sub 10fsPulses 08 29 18.pdf

A Coherent Technical Note August 29, 2018
20 | www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983
Lambda TOD Air For 1m TOD FS
TOD
Sapphire
TOD SF10 TOD BK7 TOD CaF2
1000 0.090938161 9.093816112 385.1504491 568.3555109 989.2824871 428.8090169…

ModeMaster PC User Manual

ModeMaster PC User Manual

…[HEADER]
Timestamp 3/6/2001 11:56
Head S/N XY78
Lens Name 2D doublet:vis ir 5 D
Lens Type Doublet
Lens S/N XB36
Det Lambda Limits 220 1000
Det Type Silicon
Det S/N XX63
Wavelength 632.8
FocalLength 212.02
Clip Level Low 16
Clip Level High…

COHR case study LIDAR Zugspitze Mountain 1218.pdf

COHR case study LIDAR Zugspitze Mountain 1218.pdf

…temperature will be derived in a standard
procedure from the atmospheric density that governs the backscatter signals.

*This laser is a LAMBDA SX which has since been discontinued by Coherent and replaced by the more
cost-effective LEAP laser.
Coherent Reference Customers:

COHR UVblade DS 0818 7.pdf

COHR UVblade DS 0818 7.pdf

…(33.5 in.)
520 mm
(20.5 in.)
390 mm
(15.4 in.)
548 mm
(21.6 in.)
1197 mm
(47.1 in.)
6185 mm (243.5 in.)
1050 mm
(41.3 in.)
Laser: Gen3 LAMBDA SX C-Series
Laser: Gen3 LAMBDA SX C-Series
Side View
Front View
Top View