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Lambda Sx

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf


2
TABLE OF CONTENTS
Introduction 4-9
ExciStar 10-12
IndyStar 13-15
COMPex 16-19
LEAP 20-23
LAMBDA SX 24-26
VYPER/TwinVYPER/TriVYPER 27-30
Table of Contents Excimer Lasers and UV Optical Systems
ExciStar IndyStar COMPex LEAP LAMBDA SX VYPER

LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

LAMBDA SX High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability. LAMBDA SX lasers are…

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…applications as high as 2000 Hz. It operates at ultra-short 193 nm and 248 nm wavelengths and is used for high precision processing. LAMBDA SX LAMBDA SX The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It is used for applications ranging from…

Microelectronics

Microelectronics

…lasers delivers tangible benefits in all three areas. This direct patterning process takes advantage of the extremely high pulse energy of the LAMBDA SX laser. This is an industrial-grade excimer laser which can deliver 1050 mJ at 308 nm, at a repetition rate of 300 Hz. The high pulse energy is used…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…necessary pulse energy to be highly selective, and to process large areas at industrial speed and with superior quality and yield. Related Products LAMBDA SX UVblade VarioLas LEAP Excimer Laser Annealing The challenge for Liquid crystal display (LCD) manufacturers is to produce higher performance…

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

LAMBDA SX High-Power Excimer Lasers The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor. It delivers high and stable pulse energy, and also features a number of innovative technologies for unsurpassed performance and reliability. LAMBDA SX lasers are…

COHR UVblade DS 0818 7.pdf

COHR UVblade DS 0818 7.pdf

…(33.5 in.)
520 mm
(20.5 in.)
390 mm
(15.4 in.)
548 mm
(21.6 in.)
1197 mm
(47.1 in.)
6185 mm (243.5 in.)
1050 mm
(41.3 in.)
Laser: Gen3 LAMBDA SX C-Series
Laser: Gen3 LAMBDA SX C-Series
Side View
Front View
Top View

Microsoft Word - NovusLight 2018-07 Microelectronics Packaging

Microsoft Word - NovusLight 2018-07 Microelectronics Packaging

Excimer laser based tools for RDL structuring are already in use based on the Coherent
LAMBDA SX series excimers. The high pulse energy (>1 J) and repetition rate (300 Hz) of
these excimer lasers provide rapid throughput for feature sizes down to 2 µm. In addition,
excimer laser…

compatibility matrix 02

compatibility matrix 02

…PM150X
Xantos XS (discontinued 2013) 157, 193, 248, 351 nm FieldMaxII-TO PM10X LabMax-TOP J-25MT-10KHZ
Lambda SX-Series (< 300 W) 248, 308 nm FieldMaxII-TO PM300F-50X
Lambda SX-Series (> 300 W) 308 nm FieldMaxII-TO PM1KX
VYPER 308 nm FieldMaxII-TO PM1KX
Ion Lasers

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…PM150X, - -
PM150-50XC
Xantos XS 157, 193, 248, 351 FieldMaxII-TO PM10X LabMax-TOP J-25MT-10KHZ
LAMBDA SX-Series 248 FieldMaxII-TO PM300F-50X - -
LAMBDA SX-Series 308 FieldMaxII-TO PM1KX - -
VYPER 308 FieldMaxII-TO PM1KX - -
Excimer Lasers
Measurement…

2009 LMCCatalog86.pdf

2009 LMCCatalog86.pdf

…248, 308, 351 FieldMaxII-TO PM150X, - -
PM150-50XC
Xantos XS 157, 193, 248, 351 FieldMaxII-TO PM10X LabMax-TOP J-25MT-10KHZ
LAMBDA SX-Series 248, 308 FieldMaxII-TO PM300F-50X - -
PM1KX1
Q-Switched
Lasers
Ultrafast
Amplifiers
Ultrafast
Oscillators…

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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